Characteristics

XYZ motion

Stroke to 200μm/axis

Closed-loop version is more accurate

Technical data
Type		P60.XYZ200S P60.XYZ200K	Units
Active axes		XYZ
Drive control		4 driving channels 3 sensing channels
Driving channels		4
Travel range(0~120V)		160	µm±10%
Max.travel range(0~150V)		200	µm±10%
Integrated sensor		SGS
Resolution		5.5/2	nm
Closed-loop linearity		0.2	%F.S.
Repeatability		0.1	%F.S.
Unloaded resonant frequency		270	Hz±20%
Resonant frequency@100g		110	Hz±20%
Unloaded resonant frequency@50% travel range		20	Hz±20%
El. capacitance		14/14/7.2	μF±20%
Material		Aluminum
Operating temperature		-20~80	℃
Load capacity	Horizontal	0.3	kg
	Vertical	0.1
	Inverted	0.1

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawings（Click on the picture to enlarge it）

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