Characteristics
|
|
|
Technical data | ||
Type |
P60.XYZ200S
P60.XYZ200K |
Units |
Active axes |
XYZ |
|
Driving channels |
4 |
|
Travel range(0~120V) |
160 |
µm±10% |
Travel range(0~150V) |
200 |
µm±10% |
Integrated sensor |
SGS |
|
Resolution |
5.5/2 |
nm |
Closed-loop linearity |
0.2 |
%F.S. |
Repeatability |
0.1 |
%F.S. |
Unloaded resonant frequency |
270 |
Hz±20% |
Resonant frequency@100g |
110 |
Hz±20% |
Unloaded resonant frequency@50% travel range |
20 |
Hz±20% |
El. capacitance |
14/14/7.2 |
μF±20% |
Material |
Aluminum |
|
Operating temperature |
-20~80 |
℃ |
Load capacity |
740 |
g |
|
|