Characteristics

XYZ motion

Stroke to 200μm/axis

Closed-loop version is more accurate

Technical data
Type	P60.XYZ200S P60.XYZ200K	Units
Active axes	XYZ
Driving channels	4
Travel range(0~120V)	160	µm±10%
Travel range(0~150V)	200	µm±10%
Integrated sensor	SGS
Resolution	5.5/2	nm
Closed-loop linearity	0.2	%F.S.
Repeatability	0.1	%F.S.
Unloaded resonant frequency	270	Hz±20%
Resonant frequency@100g	110	Hz±20%
Unloaded resonant frequency@50% travel range	20	Hz±20%
El. capacitance	14/14/7.2	μF±20%
Material	Aluminum
Operating temperature	-20~80	℃
Load capacity	740	g

Drawings（Click on the picture to enlarge it）

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