Characteristics
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Technical data | |||
Models |
P11.XY200Z300S P11.XY200Z300K |
Units |
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Active axes |
XYZ |
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Drive control |
3 driving channels 3 sensing channels |
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Driving source |
Piezo Stack |
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Travel range(0~120V) |
X130/Y130/Z250 |
µm±10% |
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Max.travel range(0~150V) |
X180/Y180/Z300 |
µm±10% |
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Integrated sensor |
SGS/- |
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Closed/open loop resolution |
XY4.5/1.5,Z8.5/2.5 |
nm |
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Linearity |
0.4 |
%F.S. |
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Repeatability |
0.1 |
%F.S. |
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Unloaded resonant frequency |
X200/Y180/Z200 |
Hz±20% |
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Closed-loop operating frequency(-3dB) |
40(@50g load)/- |
Hz±20% |
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Load capacity |
Horizontal |
0.2 |
kg |
Vertical |
0.03 | ||
Inverted |
0.05 | ||
Electrical capacitance |
X2.2/Y2.2/Z7 |
μF±20% |
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Material |
Aluminum, steel |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
Diagram |
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Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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