Characteristics

XYZ motion

Stroke to X180/Y180/Z300μm

Load capacity to 200g

Open/closed-loop versions

Technical data
Models	XD601.XYZ100S XD601.XYZ100K	Units
Active axes	XYZ
Drive control	3 driving channels 3 sensing channels
Driving source	Piezo Stack
Travel range(0~120V)	X130/Y130/Z250	µm±10%
Travel range(0~150V)	X180/Y180/Z300	µm±10%
Integrated sensor	SGS/-
Closed/open loop resolution	XY4.5/1.5，Z8.5/2.5	nm
Linearity	0.4	%F.S.
Repeatability	0.1	%F.S.
Unloaded resonant frequency	X200/Y180/Z200	Hz±20%
Closed-loop operating frequency（-3dB）	40（@50g load）/-	Hz±20%
Load capacity	0.2	kg
Electrical capacitance	X2.2/Y2.2/Z7	μF±20%
Material	Aluminum, steel

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

Drawings（Click on the picture to enlarge it）

3D diagram presentation

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