Models

S-clsoed loop

K-open loop

P63.X18S
P63.X18K

P63.Z8S
P63.Z8K

P63.XY18S
P63.XY18K

P63.X18Z8S
P63.X18Z8K

P63.XY18Z8S
P63.XY18Z8K

Units

Active axes

X

Z

XY

XZ

XYZ

Drive control

1 driving channel 1 sensing channel

1 driving channel 1 sensing channel

2 driving channels 2 sensing channels

2 driving channels 2 sensing channels

3 driving channels 3 sensing channels

Travel range(0~120V)

16

6

16/axis

X16, Z6

XY16, Z6

μm±10%

Travel range(0~150V)

18

8

18/axis

X18, Z8

XY18, Z8

μm±10%

Integrated sensor

SGS/-

SGS/-

SGS/-

SGS/-

SGS/-

Closed/open loop resolution

0.6/0.2

0.2/0.1

0.6/0.2

X0.6/0.2、Z0.2/0.1

XY0.6/0.2、Z0.2/0.1

nm

Closed-loop linearity

0.3/-

1/-

0.3/- 

X0.3, Z1/-

XY0.3, Z1/-

%F.S.

Repeatability

0.25/-

0.25/-

0.25/-

0.25/-

0.25/-

%F.S.

Pitch/Yaw/Roll

≤15

≤15

≤15

≤15

≤15

µrad

Unloaded resonant frequency

2

1

2

X2/Z1

X2/Y2/Z1

kHz±20%

Closed/open-loop unloaded Step time

8/0.5

8/0.5

8/0.5

8/0.5

8/0.5

ms±20%

Load capacity

0.5

0.5

0.5

0.5

0.5

kg

Electrical capacitance

1.8

0.8

1.8

X1.8, Z0.8

XY1.8, Z0.8

μF±20%

Operating temperature

-20~80

-20~80

-20~80

-20~80

-20~80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Cable length

1.5

1.5

1.5

1.5

1.5

m±10mm

Mass

-

112

-

-

235

g±5%

Auto CAD PDF

Step

P63.X18

P63.Z8

P63.XY18

P63.X18Z8

P63.XY18Z8

P63.X18

P63.Z8

P63.XY18

P63.X18Z8

P63.XY18Z8