P13.XYZ Piezo Stage, XYZ Direction, Stroke to 37.5µmCurrent Location：Product Homepage >> XYZ Piezo Nanopositioner>>P13.XYZ Piezo Stage, XYZ Direction, Stroke to 37.5µm
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P13.XYZ is XYZ moiton piezo stage. It adopts parallel kinematic mechanism to amplify the design principle. Built-in high-performance piezo actuator with max displacement of 37.5μm/axis. Open loop or closed loop version is available.


Characteristics


 XYZ axes

 Max stroke to 37.5μm

 Small size

 Quick response time


Appearance

Moving-part

Amplified-driving

Ultra-Small Size, High Resolution

Solid-state hinge parallelogram design principle, it has very high resolution and good linearity of motion.
P13 could be easily mounted to other positioning systems and could be equipped with sensing and measuring devices (strain gauge sensors) to eliminate the hysteresis and creep of piezoelectric ceramics.
P13 Piezo Stage is ideal for dynamic and scanning applications.

Sensor

Freqency VS Load Curve


Applications


 2D/3D scanning

 Light path adjustment

 Semiconductor

 Micromanipulation

 AFM

 Nanopositioning



    Technical data

Models

 S-Closed loop

K-Open loop

P13.XYZ40S

P13.XYZ40K

Units

Active axes

XYZ

 

Travel range(0~120V)

30/axis

μm±20%

Travel range(0~150V)

37.5/axis

μm±20%

Integrated sensor

SGS/-

 

Closed/open loop resolution

1/0.5

nm

Closed-loop linearity

0.2/-

%F.S.

Repeatability

0.1/-

%F.S.

Pitch/Yaw/Roll

<5

μrad

Push/pull force capacity

8/3

N

Stiffness

X0.1/Y0.15/Z0.2

N/μm±20%

Unloaded resonant frequency

X0.35/Y0.4/Z0.58

kHz±20%

Closed/open-loop unloaded Step time

30/3

ms±20%

Load capacity

0.05

kg

Electrical capacitance

0.8/axis

μF±20%

Material

Steel, Aluminum,Low temperature magnetic intensity optional

 

Mass

220

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings（Click on the picture to enlarge it）
     Downloads
Auto CAD PDF

P13.XYZ40K

P13.XYZ40S

Step

Specs Sheet
Manual

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