P13.XYZ is XYZ moiton piezo stage. It adopts parallel kinematic mechanism to amplify the design principle. Built-in high-performance piezo actuator with max displacement of 37.5μm/axis. Open loop or closed loop version is available.
Characteristics
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Appearance ![]() |
Moving-part ![]() |
Amplified-driving ![]() |
Ultra-Small Size, High Resolution
Solid-state hinge parallelogram design principle, it has very high resolution and good linearity of motion. |
Sensor ![]() |
Freqency VS Load Curve ![]() |
Applications
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Technical data | |||
Models |
S-Closed loop K-Open loop |
P13.XYZ40S P13.XYZ40K |
Units |
Active axes |
XYZ |
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Travel range(0~120V) |
30/axis |
μm±20% |
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Travel range(0~150V) |
37.5/axis |
μm±20% |
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Integrated sensor |
SGS/- |
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Closed/open loop resolution |
1/0.5 |
nm |
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Closed-loop linearity |
0.2/- |
%F.S. |
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Repeatability |
0.1/- |
%F.S. |
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Pitch/Yaw/Roll |
<5 |
μrad |
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Push/pull force capacity |
8/3 |
N |
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Stiffness |
X0.1/Y0.15/Z0.2 |
N/μm±20% |
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Unloaded resonant frequency |
X0.35/Y0.4/Z0.58 |
kHz±20% |
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Closed/open-loop unloaded Step time |
30/3 |
ms±20% |
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Load capacity |
0.05 |
kg |
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Electrical capacitance |
0.8/axis |
μF±20% |
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Material |
Steel, Aluminum,Low temperature magnetic intensity optional |
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Mass |
220 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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