P13.XYZ is XYZ moiton piezo stage. It adopts parallel kinematic mechanism to amplify the design principle. Built-in high-performance piezo actuator with max displacement of 48μm/axis. Open loop or closed loop version is available.
Characteristics
XYZ axes |
Max stroke to 48μm |
Small size |
Quick response time |
Appearance |
Moving-part |
Amplified-driving |
Ultra-Small Size, High Resolution
Solid-state hinge parallelogram design principle, it has very high resolution and good linearity of motion. |
Sensor |
Freqency VS Load Curve |
Applications
2D/3D scanning |
Light path adjustment |
Semiconductor |
Micromanipulation |
AFM |
Nanopositioning |
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Technical data | |||
Models |
S-Closed loop K-Open loop |
P13.XYZ40S P13.XYZ40K |
Units |
Active axes |
XYZ |
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Drive control |
3 driving channels 3 sensing channels |
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Travel range(0~120V) |
38.4/axis |
μm±20% |
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Travel range(0~150V) |
48/axis |
μm±20% |
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Integrated sensor |
SGS/- |
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Closed/open loop resolution |
5/3 |
nm |
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Closed-loop linearity |
0.2/- |
%F.S. |
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Repeatability |
0.1/- |
%F.S. |
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Pitch/Yaw/Roll |
<50 |
μrad |
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Push/pull force capacity |
10/3 |
N |
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Stiffness |
0.5 |
N/μm±20% |
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Unloaded resonant frequency |
0.6 |
kHz±20% |
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Closed/open-loop unloaded Step time |
20/3 |
ms±20% |
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Load capacity |
0.2 |
kg |
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Electrical capacitance |
0.2/axis |
μF±20% |
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Material |
Steel, Aluminum,Low temperature magnetic intensity optional |
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Mass |
55 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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