P13.XYZ Piezo Stage, XYZ Direction, Stroke to 48µmCurrent Location：Product Homepage >> XYZ Piezo Nanopositioner>>P13.XYZ Piezo Stage, XYZ Direction, Stroke to 48µm

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P13.XYZ is XYZ moiton piezo stage. It adopts parallel kinematic mechanism to amplify the design principle. Built-in high-performance piezo actuator with max displacement of 48μm/axis. Open loop or closed loop version is available.

Characteristics

XYZ axes

Max stroke to 48μm

Small size

Quick response time

Appearance

Moving-part

Amplified-driving

Ultra-Small Size, High Resolution

Solid-state hinge parallelogram design principle, it has very high resolution and good linearity of motion.
P13 could be easily mounted to other positioning systems and could be equipped with sensing and measuring devices (strain gauge sensors) to eliminate the hysteresis and creep of piezoelectric ceramics.
P13 Piezo Stage is ideal for dynamic and scanning applications.

Sensor

Freqency VS Load Curve

Applications

2D/3D scanning	Light path adjustment	Semiconductor	Micromanipulation
AFM	Nanopositioning

Technical data
Models	S-Closed loop K-Open loop	P13.XYZ40S P13.XYZ40K	Units
Active axes		XYZ
Drive control		3 driving channels 3 sensing channels
Travel range(0~120V)		38.4/axis	μm±20%
Max.travel range(0~150V)		48/axis	μm±20%
Integrated sensor		SGS/-
Closed/open loop resolution		5/3	nm
Closed-loop linearity		0.2/-	%F.S.
Repeatability		0.1/-	%F.S.
Pitch/Yaw/Roll		<50	μrad
Push/pull force capacity		10/3	N
Stiffness		0.5	N/μm±20%
Unloaded resonant frequency		0.6	kHz±20%
Closed/open-loop unloaded Step time		20/3	ms±20%
Load capacity	Horizontal	0.2	kg
	Vertical	0.1
	Inverted	0.1
Electrical capacitance		0.4/axis	μF±20%
Material		Steel, Aluminum,Low temperature magnetic intensity optional
Mass		55	g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

Mounting Method	Horizontal Mounting	Vertical Mounting	Inverted Mounting
Definition	Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane. PS: Default direction for carrying capacity in the parameter table	Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity	Place the PZT platform horizontally, but the moving surface is located below the PZT platform
Diagram
Note	When the mounting method is selected as vertical mounting, pay attention to the outlet port

Drawings（Click on the picture to enlarge it）

Downloads
Auto CAD PDF	P13.XYZ
Step
Specs Sheet
Manual

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Piezo · Nano · Motion