- Introduction
- Controllers
- Feedback
P63.XYZ is XYZ-axis moving piezoelectric nano-positioning stage. It adopts the design principle of piezoelectric stack direct-drive mechanism and could achieve nano-level resolution and positioning accuracy, has very high reliability, and plays an important role in the field of precision positioning.
Characteristics
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Appearance 
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Moving-part 
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Amplified-driving 
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Small Size Quick Response
P63 piezoelectric nano positioning stage is characterized by high precision and small size. The size of the P63.X is only 30×30×21mm (XYZ axis is 30×30×42mm), which is very easy to integrate into the scanning instrument. |
Sensor 
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Application case P63.XYZ has been applied to the cutting force test based on SEM online nano cutting stage. 
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Curve 
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Applications
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| Technical Data | ||||
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Models |
S-Closed loop
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P63.XYZ7S |
P63.XYZ7K |
Units |
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Active axes |
X、Y、Z |
X、Y、Z |
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Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
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Travel range(0~120V) |
5.5/axis |
5.5/axis |
μm±10% |
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Max.travel range(0~150V) |
6.8/axis |
6.8/axis |
μm±10% |
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Integrated sensor |
SGS |
- |
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Closed/open loop resolution |
0.2 |
0.1 |
nm |
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Closed-loop linearity |
0.4 |
- |
%F.S. |
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Repeatability |
0.2 |
- |
%F.S. |
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Pitch/Yaw/Roll |
<15 |
<15 |
μrad |
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Push/pull force capacity |
7/2 |
7/2 |
N |
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Stiffness |
X0.9/Y1/Z1.2 |
X0.9/Y1/Z1.2 |
N/μm±20% |
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Unloaded resonant frequency |
X0.9/Y0.95/Z1.2 |
X0.9/Y0.95/Z1.2 |
kHz±20% |
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Closed/open-loop unloaded |
1.5 |
0.3 |
ms±20% |
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Load capacity |
Horizontal |
0.4 |
0.4 |
kg |
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Vertical |
0.05 | 0.05 | ||
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Inverted |
0.1 | 0.1 | ||
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Electrical capacitance |
0.8/axis |
0.8/axis |
μF±20% |
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Material |
AI |
AI |
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Mass |
160 |
160 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
