XP-611 Description

XP-611 series piezoelectric nanopositioning stage is a one-dimensional X-axis or Z-axis piezoelectric translation stage, adopting mechanism amplification design principle, built-in high-performance piezoelectric ceramic actuators, can achieve displacement of 100μm in X-axis or Z-axis. Flexible hinge guiding structure make it with no friction and no backlash. Selectable closed-loop version with high positioning accuracy is ideal for one-dimensional precision positioning and scanning.

Compact Size, Short Settling Time, Cost-Effective

The XP-611 series piezoelectric nanopositioning stage adopts the principle of mechanism amplification, compact structure design make the size of XP-611.X only 35×35×20mm, and it is easy to integrate into other devices.

This series of positioning stages feature with a maximum displacement of up to 100 μm, high unloaded resonance frequency, fast response speed, and a step time of 0.8 ms for 100 μm travel. This products has achieved the favor of industrial users with its high reliability, high cost performance etc.

High precision, high reliability and consistency to meet industrial application requirements

COREMORROW’s XP-611 series positioning stage will have excellent design structure, small size, 100μm stroke, built-in high-reliability piezoelectric ceramics, and configured with high-precision sensor. The positioning accuracy can reach nanoscale, and the products with high consistency have widely applied in industry precision automated processing fields.

COREMORROW offers custom services. The following figure shows the custom versions of XP-611 XYZ three-dimensional piezoelectric platform.

Closed-Loop and Open-Loop Versions

Closed-loop version of the piezoelectric nanopositioning stage has a high-resolution and fast-response strain sensor (SGS), which is equipped in the most appropriate position of the drive mechanism. It can feedback to the controller with signals with high-bandwidth, nano-positioning accuracy. The sensor uses a full-bridge configuration to eliminate thermal drift and ensure optical positioning in the nanometer range.

The open-loop version of the piezoelectric nanopositioning stage is well-suited for applications requiring ultra-fast response and high resolution, but absolute positioning is not important. It can also be controlled using an external feedback system (like interferometer, PSD position sensitive diode, CCD chip/image processing system, operator's hand and eye control, etc.).

High Reliability and Long Lifetime

The compact XP-611 system is equipped with high-performance piezoelectric actuators integrated in a proven,  FEA-modeled, flexure guiding system. Internal piezoelectric actuators are co-fired piezoceramics that provide better performance and reliability.

XP-611.XYZ Technical Data