P13.XY Piezo Stage, XY Direction, Stroke to 43µmCurrent Location：Product Homepage >> XY/XZ Nanopositioner>>P13.XY Piezo Stage, XY Direction, Stroke to 43µm
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Characteristics


 XY axes

 Max stroke to 43μm

 Small size

 Quick response time


Amplified-driving

Sensor

Closed Loop Stabilization Time

Settling time of the P13.XY closed loop version full stroke is ~30ms.

Ultra-Small Size, High Resolution

Solid-state hinge parallelogram design principle, it has very high resolution and good linearity of motion.
P13 could be easily mounted to other positioning systems and could be equipped with sensing and measuring devices (strain gauge sensors) to eliminate the hysteresis and creep of piezoelectric ceramics.
P13 Piezo Stage is ideal for dynamic and scanning applications.


Applications


 2D/3D scanning

 Light path adjustment

 Semiconductor

 Micromanipulation

 AFM

 Nanopositioning



    Technical data

Models

 S-Closed loop

K-Open loop

P13.XY50S
P13.XY50K

Units

Active axes

XY

 

Drive control

2 driving channels 2 sensing channels

 

Travel range(0~120V)

34/axis

μm±10%

Travel range(0~150V)

43/axis

μm±10%

Integrated sensor

SGS/-

 

Closed/open loop resolution

1.5/0.5

nm

Closed-loop linearity

0.2/-

%F.S.

Repeatability

0.1/-

%F.S.

Pitch/Yaw/Roll

-

μrad

Push/pull force capacity

-

N

Stiffness

-

N/μm±20%

Unloaded resonant frequency

X0.55/Y0.52

kHz±20%

Closed/open-loop unloaded Step time

30/3

ms±20%

Load capacity

0.8

kg

Electrical capacitance

0.8/axis

μF±20%

Material

Steel, Aluminum,Low temperature magnetic intensity optional

 

Mass

120

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings（Click on the picture to enlarge it）
     Downloads
Auto CAD PDF

P13.XY50

Step

P13.XY50

Specs Sheet
Manual

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