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P66.XZ piezo nano-positioning stage uses piezoelectric stacks as driving source and using direct drive mechanism. It is nano-positioning system combining piezoelectric and flexible hinges. Precision, and optional high-precision sensors for closed-loop precise positioning control. This product is ideal for positioning applications such as optical path length correction in interference, sample positioning in microscopy or scanning applications, and more.
Characteristics
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Models |
S-Closed loop K-Open loop |
P66.XZ30S P66.XZ30K |
Untis |
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Active axes |
XZ |
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Drive control |
2 driving channels 2 sensing channels |
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Travel range（0~120V） |
24/axis |
μm±10% |
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Travel range（0~150V） |
30/axis |
μm±10% |
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Integrated sensor |
SGS/- |
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Closed/open loop resolution |
1/0.5 |
nm |
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Closed-loop linearity |
0.1/- |
%F.S. |
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Repeatability |
0.08/- |
%F.S. |
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Pitch/Yaw/Roll |
<15 |
µrad |
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Push/pull force capacity |
30/10 |
N |
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Stiffness in motion direction |
1.1 |
N/μm±20% |
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Unloaded resonant frequency |
X1.5/Z0.8 |
kHz±20% |
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Closed/open-loop unloaded Step time |
20/1 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
- |
Hz±20% |
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Load capacity |
1 |
kg |
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Electrical capacitance |
3.6/axis |
μF±20% |
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Material |
Aluminum |
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Mass |
320 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
