P13.XY30S P13.XY30K Piezo Nanopositioning StageCurrent Location:Product Homepage >> XY/XZ Nanopositioner>>P13.XY30S P13.XY30K Piezo Nanopositioning Stage
  • Introduction
  • Controllers
  • Feedback

P13.XY is XY moiton piezo stage. It adopts parallel kinematic mechanism to amplify the design principle. Built-in high-performance piezo actuator with max displacement of 45μm/axis. Open loop or closed loop version is available.


Characteristics


 XY axes

 Max stroke to 45μm

 Small size

 Quick response time


Appearance

Moving-part

Amplified-driving

Ultra-Small Size, High Resolution

Solid-state hinge parallelogram design principle, it has very high resolution and good linearity of motion.
P13 could be easily mounted to other positioning systems and could be equipped with sensing and measuring devices (strain gauge sensors) to eliminate the hysteresis and creep of piezoelectric ceramics.
P13 Piezo Stage is ideal for dynamic and scanning applications.

Sensor

Closed Loop Stabilization Time

Settling time of the P13.XY50S closed loop version full stroke is ~30ms.

Freqency VS Load Curve


Applications


 2D/3D scanning

 Light path adjustment

 Semiconductor

 Micromanipulation

 AFM

 Nanopositioning



    Technical data

Models

 S-Closed loop

K-Open loop

P13.XY30S

P13.XY30K

Units

Active axes

XY

 

Drive control

2 driving channels 2 sensing channels

 

Travel range(0~120V)

36/axis

μm±10%

Travel range(0~150V)

45/axis

μm±10%

Integrated sensor

SGS/-

 

Closed/open loop resolution

1/0.5

nm

Closed-loop linearity

0.2/-

%F.S.

Repeatability

0.1/-

%F.S.

Pitch/Yaw/Roll

<30

μrad

Push/pull force capacity

5/2

N

Stiffness

X0.15/Y0.2

N/μm±20%

Unloaded resonant frequency

0.6

kHz±20%

Closed/open-loop unloaded Step time

20/3

ms±20%

Load capacity

0.2

kg

Electrical capacitance

0.4/axis

μF±20%

Material

Steel, Aluminum

 

Mass

110

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF

Step

Specs Sheet
Manual

推荐控制器

E01.D3 Piezo Controller

3 channels
Software / Analog input / Rotary konb
Open/closed loop
Ave.current: 58mA


E70 Piezo controller

3 channels
Software / Analog input
Open/closed loop
Ave.current: 70mA


E53 Piezo Controller

3 channels
Software / Analog input
Open/closed loop
Ave.current: 60mA

  • Client:
    Distributor End User
  • Customer type:
    Corporation University Institute
  • Name of your Company/organication:
  • Company Location:
  • Your Contact Information:
  • Your Name:
  • Phone Number:
  • Tel:
  • E-mail:
  • Postcode:
  • (Please make sure you have given the authentic and effective contact info for us to feedback.)
  • Products:
  • Model:
  • Problem:
    Performance Appearance Software Accessories/Parts
  • Description of the Feedback:
  • auth code: Can't see clearly?

WeChat

Sweep, get the latest information on core tomorrow

Address:1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China

Tel:0451-86268790

Piezo · Nano · Motion

Copyright@ CoreMorrow Ltd. 黑ICP备16009173号-1