P63.XZ Piezo Stage, XZ Direction, Stroke to 6.8 µmCurrent Location：Product Homepage >> XY/XZ Nanopositioner>>P63.XZ Piezo Stage, XZ Direction, Stroke to 6.8 µm
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P63.XZ is XZ-axis moving piezoelectric nano-positioning stage. It adopts the design principle of piezoelectric stack direct-drive mechanism and could achieve nano-level resolution and positioning accuracy, has very high reliability, and plays an important role in the field of precision positioning.


Characteristics


 XZ

 Displacement to 6.8μm

 Quick response time

 Max load capaciyt to 0.5kg


Appearance

Moving-part

Direct-driving

Small Size Quick Response

P63 piezoelectric nano positioning stage is characterized by high precision and small size. The size of the P63.X is only 30×30×21mm (XYZ axis is 30×30×42mm), which is very easy to integrate into the scanning instrument.
P63 is high-precision nano-positioning system, which is designed for applications such as AFM, SPM, STM, and other micro-scanning nano-operations. High-speed scanning with resolution.

Sensor

Application case

P63.XYZ has been applied to the cutting force test based on SEM online nano cutting stage.


Applications


 Optical fiber end detection

 Nano-imprinting

 Nanoscale

 Micro manipulatio

 Nanometer lithography

 Micromachining/precision control

 Biotechnology/miconductor technolog

 Quality assurance test

 Interferometry/scanning microscopy/nanometer localization



    Technical Data

Models

S-Closed loop
K-Open loop

P63.XZ7S

P63.XZ7K

Units

Active axes

X、Z

X、Z

 

Travel range(0~120V)

5.5/轴

5.5/axis

μm±20%

Travel range(0~150V) 

6.8/轴

6.8/axis

μm±20%

Integrated sensor

SGS

-

 

Closed/open loop resolution

0.2

0.1

nm

Closed-loop linearity

0.2

-

%F.S.

Repeatability

0.1

-

%F.S.

Pitch/Yaw/Roll 

<10

<10

μrad

Push/pull force capacity

9/2

9/2

N

Stiffness

X1.2/Z1.5

X1.2/Z1.5

N/μm±20%

Unloaded resonant frequency

X1.5/Z1.6

X1.5/Z1.6

kHz±20%

Closed/open-loop unloaded
Step time

1.5

0.3

ms±20%

Unloaded
operating
frequency

10% Travel 

500

500

Hz±20%

100% Travel

100

100

Load capacity

0.5

0.5

kg

Electrical capacitance

0.8/轴

0.8/axis

μF±20%

Material 

铝

铝

 

Mass

120

120

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings（Click on the picture to enlarge it）
     Downloads
Auto CAD PDF

Step

Specs Sheet
Manual

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