- Introduction
- Controllers
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XP-611.Z is Z-axis piezo nanopositioning stage. It adopts the principle of mechanism amplification design and built-in high-performance piezoelectric stacks. The hinge guide mechanism has no friction and no recoil. Optional closed-loop version has high positioning accuracy and is ideal for one-dimensional precision positioning and scanning. XP-611.Z is small in size and compact in structure. It can be combined into two or three-dimensional translation stages. Examples include interference optical path length calibration, sample positioning in microscopy or scanning applications, and more. The displacement stroke can reach 100μm, and the piezoelectric drive, frictionless, and flexible guidance system can realize nanometer resolution and millisecond response time.
Features
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Appearancem 
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Direct-driving 
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Amplified-driving 
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Compact Size, Short Settling Time, Cost-Effective
XP-611 adopts the principle of mechanism amplification design. It is small in size and compact in structure. The size of XP-611.X is only 35×35×20mm, which is easy to integrate with other equipment. |
Sensor 
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High precision
CoreMorrow XP-611 has excellent design structure, small size, 100μm stroke, built-in high-reliability piezo actuators, and configured with high-precision sensor. Positioning accuracy could reach nanometer level, it has been applied to industry precision automated processing. 
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Applications
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| Technical data | ||||
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Models |
S-Closed loop |
XP-611.Z100S |
XP-611.Z100K |
Units |
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Active axes |
Z |
Z |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Travel range（0~120V） |
80 |
80 |
μm±10% |
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Travel range（0~150V） |
100 |
100 |
μm±10% |
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Integrated sensor |
SGS |
- |
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Closed/open loop resolution |
3 |
1 |
nm |
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Closed-loop linearity |
0.2 |
- |
%F.S. |
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Repeatability |
0.05 |
- |
%F.S. |
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Pitch/Yaw/Roll |
<15 |
<15 |
μrad |
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Push/pull force capacity |
30/10 |
30/10 |
N |
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Stiffness in motion direction |
0.3 |
0.3 |
N/μm±20% |
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Unloaded resonant frequency |
0.28 |
0.28 |
kHz±20% |
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Closed/open-loop unloaded Step time |
10 |
0.8 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
50（unloaded） |
- |
Hz±20% |
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Load capacity |
1.2 |
1.2 |
kg |
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Electrical capacitance |
1.8 |
1.8 |
μF±20% |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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Mass |
80 |
80 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Technical data are measured by CoreMorrow E00/E01 series piezo controller.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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Piezo · Nano · Motion
