P63.Z Piezo Stage, Z Direction, Stroke to 6.8µmCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>P63.Z Piezo Stage, Z Direction, Stroke to 6.8µm
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P63.Z is Z-axis moving piezoelectric nano-positioning stage. It adopts the design principle of piezoelectric stack direct-drive mechanism and could achieve nano-level resolution and positioning accuracy, has very high reliability, and plays an important role in the field of precision positioning.


Characteristics


 Z axis

 Displacement to 6.8μm

 Quick response time

 Max load capaciyt to 0.8kg


Appearance

Moving-part

Direct-driving

Small Size Quick Response

P63 piezo nanopositioning stage include X, Z, XY, XZ, XYZ versions and the displacement is up to6.8μm/axis. Ultra-small size is easy to integrate.

P63 is high-precision nano-positioning system, which is designed for applications such as AFM, SPM, STM, and other micro-scanning nano-operations. High-speed scanning with resolution.

Sensor

Application case

P63.XYZ has been applied to the cutting force test based on SEM online nano cutting stage.


Applications


 Optical fiber end detection

 Nano-imprinting

 Nanoscale

 Micro manipulatio

 Nanometer lithography

 Micromachining/precision control

 Biotechnology/miconductor technolog

 Quality assurance test

 Interferometry/scanning microscopy/nanometer localization



    Technical Data

Models

S-Closed loop
K-Open loop

P63.Z7S

P63.Z7K

Units

Active axes

Z

Z

 

Drive control

1 driving channel 1 sensing channel

1 driving channel

 

Travel range(0~120V)

5.5/axis

5.5/axis

μm±10%

Max.travel range(0~150V) 

6.8/axis

6.8/axis

μm±10%

Integrated sensor

SGS

-

 

Closed/open loop resolution

0.2

0.1

nm

Closed-loop linearity

0.4

-

%F.S.

Repeatability

0.2

-

%F.S.

Pitch/Yaw/Roll 

<5

<5

μrad

Push/pull force capacity

12/2

12/2

N

Stiffness

2

2

N/μm±20%

Unloaded resonant frequency

2.5

2.5

kHz±20%

Closed/open-loop unloaded
Step time

1.5

0.3

ms±20%

Load capacity

Horizontal

0.8

0.8

kg

Vertical
0.05 0.05
Inverted
0.1 0.1

Electrical capacitance

0.8/axis

0.8/axis

μF±20%

Material 

Aluminum

Aluminum

 

Mass

70

70

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.


Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF

Step

Specs Sheet
Manual
     3D diagram presentation

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