P63.Z Piezo Stage, Z Direction, Stroke to 6.8µmCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>P63.Z Piezo Stage, Z Direction, Stroke to 6.8µm
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P63.Z is Z-axis moving piezoelectric nano-positioning stage. It adopts the design principle of piezoelectric stack direct-drive mechanism and could achieve nano-level resolution and positioning accuracy, has very high reliability, and plays an important role in the field of precision positioning.


Characteristics


 Z axis

 Displacement to 6.8μm

 Quick response time

 Max load capaciyt to 0.8kg


Appearance

Moving-part

Direct-driving

Small Size Quick Response

P63 piezo nanopositioning stage include X, Z, XY, XZ, XYZ versions and the displacement is up to6.8μm/axis. Ultra-small size is easy to integrate.

P63 is high-precision nano-positioning system, which is designed for applications such as AFM, SPM, STM, and other micro-scanning nano-operations. High-speed scanning with resolution.

Sensor

Application case

P63.XYZ has been applied to the cutting force test based on SEM online nano cutting stage.


Applications


 Optical fiber end detection

 Nano-imprinting

 Nanoscale

 Micro manipulatio

 Nanometer lithography

 Micromachining/precision control

 Biotechnology/miconductor technolog

 Quality assurance test

 Interferometry/scanning microscopy/nanometer localization



    Technical Data

Models

S-Closed loop
K-Open loop

P63.X7S

P63.X7K

Units

Active axes

X

X

 

Travel range(0~120V)

5.5/axis

5.5/axis

μm±10%

Travel range(0~150V) 

6.8/axis

6.8/axis

μm±10%

Integrated sensor

SGS

-

 

Closed/open loop resolution

0.2

0.1

nm

Closed-loop linearity

0.4

-

%F.S.

Repeatability

0.2

-

%F.S.

Pitch/Yaw/Roll 

<5

<5

μrad

Push/pull force capacity

12/2

12/2

N

Stiffness

2

2

N/μm±20%

Unloaded resonant frequency

2.5

2.5

kHz±20%

Closed/open-loop unloaded
Step time

1.5

0.3

ms±20%

Load capacity

0.8

0.8

kg

Electrical capacitance

0.8/axis

0.8/axis

μF±20%

Material 

Aluminum

Aluminum

 

Mass

70

70

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF

Step

Specs Sheet
Manual
     3D diagram presentation

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