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P63.Z is Z-axis moving piezoelectric nano-positioning stage. It adopts the design principle of piezoelectric stack direct-drive mechanism and could achieve nano-level resolution and positioning accuracy, has very high reliability, and plays an important role in the field of precision positioning.
Characteristics
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Appearance 
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Moving-part 
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Direct-driving 
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Small Size Quick Response
P63 piezo nanopositioning stage include X, Z, XY, XZ, XYZ versions and the displacement is up to6.8μm/axis. Ultra-small size is easy to integrate. |
Sensor 
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Application case P63.XYZ has been applied to the cutting force test based on SEM online nano cutting stage. 
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Applications
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| Technical Data | ||||
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Models |
S-Closed loop
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P63.Z7S |
P63.Z7K |
Units |
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Active axes |
Z |
Z |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Travel range(0~120V) |
5.5/axis |
5.5/axis |
μm±10% |
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Travel range(0~150V) |
6.8/axis |
6.8/axis |
μm±10% |
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Integrated sensor |
SGS |
- |
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Closed/open loop resolution |
0.2 |
0.1 |
nm |
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Closed-loop linearity |
0.4 |
- |
%F.S. |
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Repeatability |
0.2 |
- |
%F.S. |
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Pitch/Yaw/Roll |
<5 |
<5 |
μrad |
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Push/pull force capacity |
12/2 |
12/2 |
N |
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Stiffness |
2 |
2 |
N/μm±20% |
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Unloaded resonant frequency |
2.5 |
2.5 |
kHz±20% |
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Closed/open-loop unloaded |
1.5 |
0.3 |
ms±20% |
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Load capacity |
0.8 |
0.8 |
kg |
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Electrical capacitance |
0.8/axis |
0.8/axis |
μF±20% |
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Material |
Aluminum |
Aluminum |
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Mass |
70 |
70 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
