Type

S-Closed loop

K-Open loop

P84.X100S

P84.X100K

P84.X250S

P84.X250K

Units

Active axes

X

X

Travel range

13mm+100µm

13mm+250μm

Material

Steel, Aluminum

Steel, Aluminum

Travel range

13

13

mm

Resolution

10

10

µm

Driving mode

Screw thread pair

Screw thread pair

Sensitivity

<2

<2

µm

Least count

10

10

µm/格

Screw pitch

0.5

0.5

mm/rev.

Travel range

0~120 V

80

200

µm±20%

0~150 V

100

250

µm±20%

Sensor

SGS/-

SGS/-

Min step ( resolution )

3/1

7/2

nm, typ.

Closed-loop linearity

0.1/-

0.1/-

%F.S.

Repeatability

0.05/-

0.05/-

%F.S.

Push force capacity

16

8

N

Stiffness

1

0.03

N/µm±20%

Unloaded resonant frequency

380

210

Hz±20%

Load ( Z axis )

500

200

g

Operating temperature

-20~80

-20~80

°C

Electrical capacitance

1.8

7.2

µF±20%

Mass

100

100

g±5%

Cable

1.5

1.5

m±10mm

Connector

LEMO

LEMO