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Piezo micrometer refers to the integrated piezo stage based on the manual micrometer. The manual micrometer could adjust 13mm displacement. The piezo stage could adjust 25μm displacement. The accuracy is within the adjustment range of piezo stage, thus ensuring the convenience and accuracy of the adjustment
Macro-Micro Composition
Macro-micro composition is to complete the large-scale precision positioning requirements through macro adjustment micrometer head and piezoelectric micro-motion adjustment mechanism.
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Piezo driving 
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Manual adjustment 
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Macro-Micro Composition 
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1 Axes Large Displacement Linear Stage 
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2 Axes Large Displacement Linear Stage 
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3 Axes Large Displacement Linear Stage 
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Driving and Controlling 
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| Technical data | ||||
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Model |
S-Closed loop |
P83.X25S |
P83.X25K |
Units |
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K-Open loop |
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Active axes |
X |
X |
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Travel range |
13mm+25μm |
13mm+25μm |
mm+μm |
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Material |
Steel |
Steel |
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Manual Adjustment travel range |
13 |
13 |
mm |
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Manual Adjustment resolution |
10 |
10 |
μm |
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Driving mode |
Screw thread pair |
Screw thread pair |
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Sensitivity |
<2 |
<2 |
μm |
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Least count |
10 |
10 |
μm |
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Screw pitch |
0.5 |
0.5 |
mm/rev. |
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Piezo adjustment travel range |
0~120 V |
20 |
20 |
μm±20% |
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0~150 V |
25 |
25 |
μm±20% |
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Sensor |
SGS |
- |
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Min step（resolution） |
1 |
0.5 |
nm, typ. |
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Closed-loop linearity |
0.2 |
- |
%F.S. |
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Repeatability |
0.1 |
- |
%F.S. |
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Push force capacity |
20 |
20 |
N |
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Stiffness |
2 |
2 |
N/μm±20% |
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Load（Z axis） |
500 |
500 |
g |
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Operating temperature |
-20~80 |
-20~80 |
°C |
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Electrical capacitance |
1.8 |
1.8 |
μF±20% |
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Cable length |
1.5 |
1.5 |
m±10mm |
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Connector |
LEMO |
LEMO |
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Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
