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New Arrival | CoreMorrow Closed-loop XYZ Piezo Screw Motion Platform

Update time：2023-02-13 11:46:30Clicks：1687second

Today we introduce you a closed-loop, XYZ motion, piezo screw driven piezo motion platform. Users of piezo screw motion platforms will know that in general, such motion platforms are almost open-loop, without closed-loop servo control sensors. However, considering the user's high precision requirements under the large-stroke motion control, we specially designed and developed XYZ65N81E26 piezo screw motion platform. This platform is equipped with an incremental encoder, which can precisely control the motion stroke and accuracy, and the accuracy can be up to 1.5μm.

CoreMorrow XYZ65N81E26 Piezo Screw Motion Platform

Characteristics

XYZ Motion

Closed-loop incremental encode

Travel range ±12.5mm/axis

Nanoscale displacement

Precision up to 1.5μm

Principle of motion

The XYZ65N81E26 piezo screw movement platform is driven by piezo screws. The movement of piezo screws drives the screw rotation through the micro movement of internal piezo ceramics, so as to move forward along the thread. The push of the threaded rod makes the load move the linear movement of the platform surface.

Technical Data

The parameters are shown in the following table:

Model	XYZ65N81E26
Active Axis	X
Integrated sensor type	Incremental encoder
Nominal travel range	±12.5mm
Speed	50μm/s
Closed/open-loop resolution	80nm
Linearity	1.5μm
Repeatability	1.5μm
Load capacity	1.5kg
Operating temperature	0~50℃
Mass (including cables）	2.61kg
Material	Aluminum, Steel
Cable Length	1.5m
Recommended Controller	E53.D1E

Tested Data

The results below were measured at 1.5kg load, 28.8℃ temperature, and 31% humidity.

Active axis	X	Y	Z
Linearity	1.253μm	1.327μm	1.157μm
Repeatability	1.439μm	0.275μm	1.134μm
Resolution	80nm	80nm	80nm
Speed	55.30μm/s	64.62μm/s	54.50μm/s

Customize Parameters and Vacuum Version

CoreMorrow provide custom piezo screw motion platform according to user's parameter requirements. Users can choose one to three axes movement, and incremental encoder for option. In addition, the vacuum compatible version can also be customized, vacuum degree up to 10^-6mbar.

Application

The XYZ65N81E26 is a three axes linear piezo screw motion platform. Due to its characteristics of large stroke and high precision, it is very suitable for semiconductor testing, wafer detection, nanoimprint, nanometrology, industrial precision positioning and other fields.

Auxiliary Controller

XYZ65N81E26 piezo screw motion platform adopts E53.D1E controller developed and produced by CoreMorow, which can be connected and communicated with the computer through serial port. The computer software can control the movement of the piezo screw motion platform, and the movement speed and other parameters can be set.