XY/XYZ72 Piezo Motor Stage XY72N81K13 XYZ72SN81K13 XYZ72KN81K13Current Location:Product Homepage >> Linear/Piezo Motor Driven Rotation Stage>>XY/XYZ72 Piezo Motor Stage XY72N81K13 XYZ72SN81K13 XYZ72KN81K13
CoreMorrow piezo motor stage
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Characteristics


 XY travel range:±5mm

 XY Min displacement increment:<30 nm

 XY resolution:50 μm

    Technical Data

Type

XY72N81K13

 XYZ72SN81K13

XYZ72KN81K13

Units

Active axes

X Y

X Y Z

X Y Z

 

XY travel range

±5

±5

±5

mm

Z travel range

-

8@150V

8@150V

μm

XY Min displacement increment

<30

<30

<30

nm

Z resolution

-

0.3

0.1

nm

Z sensor

-

SGS

-


Z linearity

-

0.25

-

%F.S.

Z repeatability

-

0.25

-

%F.S.

Z unloaded resonant frequency

-

2.5

2.5

kHz

Load

1.5

Upright: 500
Side:200

Upright: 500
Side:200

g

Aperture

φ35

φ35

φ35

mm

Mass

-

695

695

g

    XY72N81K13 Drawings

   (Click on the picture to enlarge it)

    XYZ72S/KN81K13

    Drawings(Click on the picture to enlarge it)

    Downloads
Auto CAD PDF

XY72

XYZ72

Step

Specs Sheet

XYZ72S/KN81K13

Manual


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