Normally, piezo nanopositioning stage is designed for use at common room condition, however, many users still need to use the stages in vacuum environments. For example, when the research needs to be based on vacuum conditions, it is necessary to build a corresponding vacuum experimental environment, and the corresponding piezo nanopositioning stage for precise positioning needs to work in vacuum environment. It is necessary to ensure the normal operation of the piezo nano-positioning platform in vacuum environment, and will not wear, leak or generate too much heat, so as to avoid adverse effects on the vacuum degree of vacuum environment, such as changing the vacuum degree.
According to the vacuum degree, the vacuum environment can be divided into vacuum and ultra-high vacuum at least. The vacuum degree of 10^-6mbar is medium vacuum environment, and 10^-9mbar is ultra-high vacuum.
XD731 series piezo nanopositioning stage are designed for vacuum applications with vacuum compatibility up to 10^-7mbar. It can be adjusted in the X, Y and Z directions at the nanometer level at the same time, with excellent flexibility.
Characteristics
• XYZ motion
• Vacuum compatibility
• Very compact
• Optional feedback sensor
Application
• XYZ fast scanning in vacuum
• Nano positioning
• Biotechnology
• Quantum measurement
Control Voltage and Displacement Curve
XD731 vacuum XYZ piezo stage can be equipped with closed-loop sensor. After measurement, the curve between drive control voltage and actual displacement under closed-loop condition is shown in the figure below.
Resonant Frequency
The measured results show that the unloaded resonant frequency of XD731 closed-loop vacuum piezo stage is greater than 400Hz, and the resonant frequency under 250g load is greater than 150Hz.
Custom Design for Vacuum Version
CoreMorrow accepts custom design for all kinds of vacuum version piezo products .
According to the vacuum parameter requirements and vacuum conditions provided by users, CoreMorrow can design one-dimensional or multidimensional piezo stage based on flexible flexural machinery. During the design process, we not only ensure the standard parameters, but also focus on the material selection under vacuum conditions to make sure the material do not have adverse effects on the vacuum environment, and make the motion control precision of each axis to reach the best state.
While the space of vacuum experimental environment is usually limited, CoreMorrow will not only optimize the stages in parameters and materials, but also in appearance and size.
Vacuum Flange
In order to ensure the vacuum degree and better working condition, the piezo stage in vacuum environment and the piezo controller outside the vacuum chamber need to be connected through the vacuum flange. We can provide users with vacuum flanges of various sizes and specifications to facilitate the installation of positioning system in vacuum environment.
XD731 Technical Data
|
XD731.XYZ100K |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Step time @250g |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
For more information about nano positioning in vacuum environment,please contact us(www.coremorrow.com).