- Introduction
- Feedback
XD731 Series XYZ piezo stage is designed for the application in vacuum, and it has vacuum compatibility up to 10^-7mbar。
Characteristics
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Application
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| Technical Data | ||||
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Types |
XD731.XYZ100S |
XD731.XYZ100K |
Units |
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Active axes |
X、Y、Z |
X、Y、Z |
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Drive control |
4 driving channels 3 sensing channels |
4 driving channels |
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Nominal travel（0~120V） |
80/axis |
80/axis |
μm±10% |
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Max.travel range（0~150V） |
100/axis |
100/axis |
μm±10% |
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Sensor type |
SGS |
- |
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Resolution |
3 |
1 |
nm |
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Linearity |
0.07 |
- |
%F.S. |
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Repeatability |
0.03 |
- |
%F.S. |
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Pitch/yaw/roll |
≤35 |
≤35 |
μrad |
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Push/pull force |
50/15 |
50/15 |
N |
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Stiffness in motion direction |
1.5/1.5/0.9 |
1.5/1.5/0.9 |
N/μm±20% |
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Unloaded resonant frequency |
400 |
400 |
Hz±20% |
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Resonant frequency @250g |
150 |
150 |
Hz±20% |
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Unloaded step time |
20 |
<20 |
ms±20% |
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Step time @250g |
30 |
- |
ms±20% |
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Load capacity |
Horizontal |
0.5 |
0.5 |
kg |
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Vertical |
0.2 | 0.2 | ||
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Inverted |
0.4 | 0.4 | ||
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El.capacitance |
7.2/axis |
7.2/axis |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
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Mass |
680 |
680 |
g±5% |
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Vacuum compatibility |
10E-7 |
10E-7 |
mbar |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
