XD731.XYZ100S/K Series XYZ Piezo Stage( Vaccum-Compatible )Current Location:Product Homepage >> XYZ Piezo Nanopositioner>>XD731.XYZ100S/K Series XYZ Piezo Stage( Vaccum-Compatible )
XD731 XYZ vaccum compatible piezo stage from CoreMorrow
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XD731 Series XYZ piezo stage is designed for the application in vacuum, and it has vacuum compatibility up to 10^-7mbar。


Characteristics


 XYZ motion

 Vacuum compatibility

 Very compact

 Optional feedback sensor


Application


 XYZ fast scanning in vacuum

 Nano positioning

 Biotechnology

 Quantum measurement

    Technical Data

Types

XD731.XYZ100S

XD731.XYZ100K

Units

Active axes

X、Y、Z

X、Y、Z

 

Drive control

4 driving channels 3 sensing channels

4 driving channels

 

Nominal travel(0~120V)

80/axis

80/axis

μm±10%

Travel range(0~150V)

100/axis

100/axis

μm±10%

Sensor type

SGS

-

 

Resolution

3

1

nm

Linearity

0.07

-

%F.S.

Repeatability

0.03

-

%F.S.

Pitch/yaw/roll

≤35

≤35

μrad

Push/pull force

50/15

50/15

N

Stiffness in motion direction

1.5/1.5/0.9

1.5/1.5/0.9

N/μm±20%

Unloaded resonant frequency

400

400

Hz±20%

Resonant frequency @250g

150

150

Hz±20%

Unloaded step time

20

<20

ms±20%

Step time @250g

30

-

ms±20%

Load capacity

0.5

0.5

kg

El.capacitance

7.2/axis

7.2/axis

μF±20%

Material

Steel, Al

Steel, Al

 

Mass

680

680

g±5%

Vacuum compatibility

10E-7

10E-7

mbar

    Drawings(Click on the picture to enlarge it)
Click on the picture to enlarge it
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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