XD731 Series XYZ piezo stage is designed for the application in vacuum, and it has vacuum compatibility up to 10^-7mbar。
Characteristics
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Application
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Technical Data | |||
Types |
XD731.XYZ100S |
XD731.XYZ100K |
Units |
Active axes |
X、Y、Z |
X、Y、Z |
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Driving channels |
4 |
4 |
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Nominal travel(0~120V) |
80/axis |
80/axis |
μm±10% |
Travel range(0~150V) |
100/axis |
100/axis |
μm±10% |
Sensor type |
SGS |
- |
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Resolution |
3 |
1 |
nm |
Linearity |
0.07 |
- |
%F.S. |
Repeatability |
0.03 |
- |
%F.S. |
Pitch/yaw/roll |
≤35 |
≤35 |
μrad |
Push/pull force |
50/15 |
50/15 |
N |
Stiffness in motion direction |
1.5/1.5/0.9 |
1.5/1.5/0.9 |
N/μm±20% |
Unloaded resonant frequency |
400 |
400 |
Hz±20% |
Resonant frequency @250g |
150 |
150 |
Hz±20% |
Unloaded step time |
20 |
<20 |
ms±20% |
Step time @250g |
30 |
- |
ms±20% |
Load capacity |
0.5 |
0.5 |
kg |
El.capacitance |
7.2/axis |
7.2/axis |
μF±20% |
Material |
Steel, Al |
Steel, Al |
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Mass |
680 |
680 |
g±5% |
Vacuum compatibility |
10E-7 |
10E-7 |
mbar |
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