XD731 Series XYZ piezo stage is designed for the application in vacuum, and it has vacuum compatibility up to 10^-7mbar。

Characteristics

XYZ motion

Vacuum compatibility

Very compact

Optional feedback sensor

Application

XYZ fast scanning in vacuum

Nano positioning

Biotechnology

Quantum measurement

Technical Data
Types	XD731.XYZ100S	XD731.XYZ100K	Units
Active axes	X、Y、Z	X、Y、Z
Driving channels	4	4
Nominal travel（0~120V）	80/axis	80/axis	μm±10%
Travel range（0~150V）	100/axis	100/axis	μm±10%
Sensor type	SGS	-
Resolution	3	1	nm
Linearity	0.07	-	%F.S.
Repeatability	0.03	-	%F.S.
Pitch/yaw/roll	≤35	≤35	μrad
Push/pull force	50/15	50/15	N
Stiffness in motion direction	1.5/1.5/0.9	1.5/1.5/0.9	N/μm±20%
Unloaded resonant frequency	400	400	Hz±20%
Resonant frequency @250g	150	150	Hz±20%
Unloaded step time	20	<20	ms±20%
Step time @250g	30	-	ms±20%
Load capacity	0.5	0.5	kg
El.capacitance	7.2/axis	7.2/axis	μF±20%
Material	Steel, Al	Steel, Al
Mass	680	680	g±5%
Vacuum compatibility	10E-7	10E-7	mbar

Drawings（Click on the picture to enlarge it）

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