Linear Piezo Nanopositioning Stage XYZ65N81E26Current Location:Product Homepage >> Linear Piezo Motors>>Linear Piezo Nanopositioning Stage XYZ65N81E26
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XYZ65N81E26 is a combined motion platform driven by piezo screws, suitable for mm large stroke position adjustment.  


Characteristics


 Motion in X, Y, Z   

 Travel to ±12.5mm/axis

 Optional vacuum version


Application


 Precise positioning

  Position scanning  

 Optical path adjustment

    Technical Data

Type

XYZ65N81E26

Units

Active axes

X, Y, Z


Integrated sensor

Incremental encoder


Travel range

±12.5/axis

mm

Max. speed

30

μm/S±10%

Resolution

<30

nm±10%

Load capacity

1.5

kg
Two-way repeatability
2
μm
Material
Steel, aluminum

Operating temperature[1]
0-40

Mass
1.45
kg
Cable length
1.5
m
Note: UHV version is available.
[1]: custom is available.

    Drawings(Click on the picture to enlarge it)
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual


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