XYZ65N81E26 is a combined motion platform driven by piezo screws, suitable for mm large stroke position adjustment.
Characteristics
Motion in X, Y, Z |
Travel to ±12.5mm/axis |
Optional vacuum version |
Application
Precise positioning |
Position scanning |
Optical path adjustment |
Technical Data | ||
Type |
XYZ65N81E26 |
Units |
Active axes |
X, Y, Z |
|
Integrated sensor |
Incremental encoder |
|
Travel range |
±12.5/axis |
mm |
Max. speed |
30 |
μm/S±10% |
Resolution |
<30 |
nm±10% |
Load capacity |
1.5 |
kg |
Two-way repeatability |
2 |
μm |
Material |
Steel, aluminum |
|
Operating temperature[1] |
0-40 |
℃ |
Mass |
1.45 |
kg |
Cable length |
1.5 |
m |
|
|