For some users who intend to use the piezo stage for high-precision adjustment, when they understand the nano-level high-precision of the piezo stage, the first time is a "heart-seeking" mentality, and want to integrate it into their own systems immediately However, when learning the range of micrometer-scale motion of the piezo stage, he was "very discouraged".
For this kind of discouraged users, CoreMorrow specially designed the piezoelectric macro-micro composite stage, which not only obtains the nanometer high precision of the piezo stage, but also has tens of millimeters or even meters of motion range!
Note: The lower the value of the resolution, the higher the resolution.
Introduction to Macro-Micro motion stage
Macro-micro motion stage is a combination of a piezoelectric stage and a hand adjustment or other electric translation stage, and the combination will not lose the high resolution of the piezoelectric stage. The piezoelectric macro-micro composite stage using a hand-adjusting translation stage generally has a hand-adjustment stroke of 13mm, and its resolution reaches 10 μm, which is within the range of fine-adjustment stroke of the piezoelectric stage. After the coarse adjustment is performed manually, the piezoelectric platform is used for fine adjustment at the nano level.
As shown in the figure above, the piezoelectric macro-micro motion stage is composed of a piezoelectric stage, a micrometer (or other electric adjustment table), and a mobile stage. It seems to be a simple structure, but it is very difficult to design, manufacture, and assemble . The piezoelectric stage must be perfectly combined with the micrometer and the mobile stage. Any detail must be considered, even if it is just a screw.
The displacement of the piezo macro-micro motion stage can be freely selected from 1 to 3 dimensions, and the combined structure makes it free of coupling between the axes during three-dimensional movement.
CoreMorrow has two standard piezoelectric macro-micro motion stages, namely P83 and P84 series. The coarse adjustment strokes are the same, both are 13mm, and the fine adjustment strokes are 25μm and 100μm. The following figure shows the core tomorrow P83 series and P84 series Similar to the P83 series.
Parameters, sizes and shapes can be customized
In the standard CoreMorrow's standard piezoelectric macro-micro motion stage, the coarse adjustment stroke standard is 13mm, and the piezoelectric fine adjustment stroke is 25μm or 100μm. The parameters and other parameters can be obtained through customization, such as the macro adjustment of the size, shape and parameters of the stage, and the size, shape and parameters of the piezoelectric stage can be customized.
The picture below is a customized piezoelectric macro-micro motion stage, which uses a piezoelectric stage combined with a motor stage without using a micrometer. It is an XY two-dimensional motion. The coarse adjustment stroke of each axis is more than 50mm / axis, and the fine adjustment stroke is 68μm / axis.
The following figure is another customized piezoelectric macro-micro motion stage. It uses a Z-directional motion piezoelectric stage combined with an XY manual adjustment stage. The Z-direction piezoelectric travel is more than 260μm, and the center has a through hole. After the manual XY position adjustment is completed, high-precision position adjustment in the Z direction can be performed, which is very suitable for scenes such as micro imaging.
Piezoelectric micrometer
Piezo micrometer is a piezoelectric macro-micro motion stage without mobile stage. For some users, they already have their own mobile stage. Only a micro-actuated actuator such as a piezoelectric micrometer can be directly used for such needs. Choose CoreMorrow's piezoelectric micrometer, and the interface can be customized.