Take P11 series as an example to introduce the piezo nanopositioning stage.
P11 series piezo stage includes a variety of models, 1 to 3 dimensional motion versions are available, and the stroke is selectable from 100μm to 300μm. From the appearance, the P11 series has two shapes. The length and width of the two shapes are the same, both are 40 × 40mm. The height of the corresponding shape is different due to the different stroke size or dimensions. There are two types of 22mm and 36.5mm .
Single-axis motion version of the P11 series piezo stage can travel up to 300μm, and the standard travel of the 2D or 3D version is 100μm/axis. It uses the principle of mechanism amplification to amplify the displacement generated by the internal piezoelectric ceramic drive source. After the displacement is amplified, the load-carrying capacity is reduced accordingly, but the load-carrying capacity of the P11 three-dimensional version can still reach 600g.
Open / closed loop version
P11 series piezo stage is also divided into open-loop and closed-loop versions. In contrast, the closed-loop version is additionally equipped with a closed-loop sensor to detect the actual displacement generated by the stage itself. Open and closed loops can be distinguished from the lead connector of the stage. For example, for a standard piezoelectric stage, LEMO connectors are generally equipped. If there are two types of connectors for the stage, as shown in the figure below, there are two types of single-core and four-core LEMO connectors. The stage is a closed-loop version, if there is only one single-core LEMO connector, the open-loop version.
In addition, the movement dimension of the piezo stage can also be determined according to the number of single-core LEMO connectors, one for one dimension movement, two for two movement dimensions, and so on.
The above method is only applicable to the identification method of the open and closed loops of the piezo stage in the form of LEMO connector.
Fixed installation
In order to facilitate the mechanical connection of the load, four M3 threaded holes are designed on the P11 to provide users with a fixed interface.
In addition, there are four Ø2.7mm through holes in the four corners of the P11 piezo stage for fixing.
During installation and using, make sure that the gap between the moving surface of the piezo stage and the non-moving base is clean, and no sheets, glue, etc. that hinder the movement of the stage can be placed between the gaps. The displacement is reduced or not output.
Applications
The features of the piezo stage are nano-level high resolution and precision, millisecond to sub-millisecond fast response speed, simple control method, low cost, etc., so it has a very wide range of applications, such as micro imaging, laser processing (crystal Circular cutting), micro-nano turning, image resolution enhancement, optical detection phase shifter and other fast micro-nano actuation applications.