Nanolithography is a completely new method of nano-pattern replication. The essence is to apply the traditional mold replication principle to the field of micro manufacturing. First, the computer converts the BMP image into a grayscale image, and then uses a two-dimensional piezo scanner to drive the coated lens to optimize the image information read. At the same time, it controls the laser and the piezo scanner to complete the nanopositioning processing of the image. Nanolithography is the key to making nanostructures and has broad application prospects.
Using of CoreMorrow P12 series XY piezo scanner could drive the coated lens to optimize the image information reading, and at the same time control the laser and piezo scanner, the two cooperate to complete the nanometer precision processing of the image.
P12.XY100 is XY piezo linear scanner with built-in high-reliability piezo actuators. It has good linearity of motion. The aperture the scanner can be selected from 25mm or 35mm.
Open/closed Loop Curve
Closed Loop Linearity
Technical Data
Model: P12.XY100
Active axes: XY
Travel range@120V: 80μm/axis
Travel range@150V: 100μm/axis
Sensor: SGS
Aperture: Ø25/Ø35mm
Closed/open loop resolution: 7/4nm
Closed-loop linearity: 0.1%F.S.
Repeatability: 0.05%F.S.
Pitch/Yaw/Roll: 25/8N
Stiffness: 0.2N/μm
Unloaded resonant frequency: X180/Y230Hz
Closed/open-loop unloaded Step time:15/0.8ms
Load capacity: 0.7kg
Electrical capacitance: 1.8μF/axis
Material: Steel, Aluminum
Mass: 200g