- Introduction
- Feedback
XD107 piezo scanner moves in XYZ, it has a large square aperture, and is ideal for sample microscopy imaging applications.
Characteristics
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Application
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| Technical Data | ||||
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Type |
XD107.XY100Z80S |
XD107.XY100Z80K |
Units |
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Active axes |
X Y Z |
X Y Z |
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Drive control |
3 driving channels |
3 driving channels |
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Travel range(0~120V) |
XY80/Z64 |
XY80/Z64 |
μm±10% |
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Max.travel(0~150V) |
XY100/Z80 |
XY100/Z80 |
μm±10% |
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Sensor |
SGS |
- |
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Aperture |
50×50 |
50×50 |
mm |
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Size |
94×94×24.5 |
94×94×24.5 |
mm |
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Resolution |
3 |
1 |
nm |
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Linearity |
XY0.2/Z0.1 |
- |
%F.S. |
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Repeatability
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XY0.02/Z0.02 |
- |
%F.S. |
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Pitch/yaw/roll |
≤ 30 |
≤ 30 |
μrad |
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Unloaded resonant frequency |
XY220/Z160 |
XY220/Z160 |
Hz±20% |
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Resonant frequency @500g |
XY110/Z80 |
XY110/Z80 |
Hz±20% |
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El. capacitance |
XY3.6/Z1.8 |
XY3.6/Z1.8 |
μF±20% |
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Load capacity |
Horizontal |
0.4 |
0.4 |
kg |
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Vertical |
0.03 | 0.03 | ||
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Inverted |
0.04 | 0.04 | ||
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Material |
Al, Steel |
Al, Steel |
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Mass |
420 |
420 |
g±5% |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
