XD107 Piezo Nanopositioning ScannerCurrent Location:Product Homepage >> XYZ Piezo Nanopositioner>>XD107 Piezo Nanopositioning Scanner
XD107 Piezo Nanopositioning Scanner
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XD107 piezo scanner moves in XYZ, it has a large square aperture, and is ideal for sample microscopy imaging applications.


Characteristics


 XYZ motion

 Travel up to 100μm

 Load capacity to 0.4kg

 Aperture of 50×50mm


Application


 Scanning microscopy

 Mask/wafer positioning

 Interferometry

  Metrology

 Micromanipulation, etc.

 Biotechnology 



    Technical Data

Type

XD107.XY100Z80S

XD107.XY100Z80K

Units

Active axes

X Y Z

X Y Z

 

Drive control

3 driving channels
3 sensing channels

3 driving channels
3 sensing channels


Travel range(0~120V)

XY80/Z64

XY80/Z64

μm±10%

Travel(0~150V)

XY100/Z80

XY100/Z80

μm±10%

Sensor

SGS

-

 

Aperture

50×50

50×50

mm

Size

94×94×24.5

94×94×24.5

mm

Resolution

3

1

nm

Linearity

XY0.2/Z0.1

-

%F.S.

Repeatability

XY0.02/Z0.02

-

%F.S.

Pitch/yaw/roll

≤ 30

≤ 30

μrad

Unloaded resonant frequency

XY220/Z160

XY220/Z160

Hz±20%

Resonant frequency @500g

XY110/Z80

XY110/Z80

Hz±20%

El. capacitance

XY3.6/Z1.8

XY3.6/Z1.8

μF±20%

Load capacity

0.4

0.4

kg

Material

Al, Steel

Al, Steel


Mass

420

420

g±5%

    Drawings(Click on the picture to enlarge it)
Click on the picture to enlarge it
    Downloads
Auto CAD PDF
Step
Specs Sheet
Manual

     3D diagram presentation

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