- Introduction
- Feedback
H60 Piezo Hexapod is a piezo stage with 6-axis motion of θx, θy, θz, X, Y, and Z. 6-axis movement in space is realized by the coordinated expansion and contraction of six piezo actuators. The closed-loop model has high positioning accuracy. It is suited for applications such as microelectronics precision machining, test, etc.
Characteristics
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Piezo Drive 
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Motion Directions 
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Performance Test 
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Travel vs Voltage Curves 
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Angular Motion Resolution Curve 
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Typical Applications
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| Technical data | ||||
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Models |
S - closed loop K - open loop |
H60.XYZTR5S |
H60.XYZTR5K |
Units |
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Active axis |
X, Y, Z, θx, θy, θz |
X, Y, Z, θx, θy, θz |
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Drive control |
6 driving channels 6 sensing channels |
6 driving channels |
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Linear travel in X, Y (0~120V) |
±40 |
±40 |
µm±20% |
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Linear travel in Z (0~120V) |
±27.5 |
±27.5 |
µm±20% |
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Tilt angle in θx, θy(0~120V) |
±0.6(≈±123″) |
±0.6(≈±123″) |
mrad±20% |
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Tilt angle in θz(0~120V) |
±0.8(≈±165″) |
±0.8(≈±165″) |
mrad±20% |
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Tilt resolution, θx,θy |
Better than 0.5（≈0.1″ ） |
Better than 0.5（≈0.1″ ） |
μrad |
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Tilt resolution, θz |
Better than 0.5（≈0.1″ ） |
Better than 0.5（≈0.1″ ） |
μrad |
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Resolution in X、Y |
Better than 0.5 |
Better than 0.5 |
nm |
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Resolution in Z |
Better than 0.5 |
Better than 0.5 |
nm |
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Closed-loop linearity |
Better than 0.1 |
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%F.S. |
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Closed-loop repeatability |
Better than 0.1 |
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%F.S. |
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Unloaded resonant frequency |
1 |
1 |
kHz±5% |
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Structure |
Hexapods |
Hexapods |
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Driving source |
Piezo actuators |
Piezo actuators |
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Load capacity |
5 |
5 |
kg |
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Mass |
1300 |
1300 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
