- Introduction
- Feedback
H60 Series Piezo Hexapods is a piezo stage with six-axis motion of θx, θy, θz, X, Y, and Z. The six-degree-of-freedom movement in space is realized by the coordinated expansion and contraction of six piezoelectric actuators. The closed-loop model has high positioning accuracy. It is suited for applications such as six-degree-of-freedom micro-operation and micro-electronic precision machining.
Characteristics
|
|
|
|
|
|
Piezo Drive 
|
Motion Directions 
|
Performance Test 
|
|
Travel vs Voltage Curves 
|
Angular Motion Resolution Curve 
|
Linear Motion Resolution Curve 
|
Typical Applications
|
|
|
|
|
|
|
|
|
|
| Technical data | ||||
|
Models |
S - closed loop K - open loop |
H60.XYZTR5S |
H60.XYZTR5K |
Units |
|
Active axis |
X, Y, Z, θx, θy, θz |
X, Y, Z, θx, θy, θz |
|
|
|
Drive control |
6 driving channels 6 sensing channels |
6 driving channels |
|
|
|
Linear travel in X, Y (0~120V) |
±40 |
±40 |
µm±20% |
|
|
Linear travel in Z (0~120V) |
±27.5 |
±27.5 |
µm±20% |
|
|
Tilt angle in θx, θy(0~120V) |
±0.6(≈±123″) |
±0.6(≈±123″) |
mrad±20% |
|
|
Tilt angle in θz(0~120V) |
±0.8(≈±165″) |
±0.8(≈±165″) |
mrad±20% |
|
|
Tilt resolution, θx,θy |
Better than 0.5（0.1″ ） |
Better than 0.5（0.1″ ） |
μrad |
|
|
Tilt resolution, θz |
Better than 0.5（0.1″ ） |
Better than 0.5（0.1″ ） |
μrad |
|
|
Resolution in X、Y |
Better than 0.5 |
Better than 0.5 |
nm |
|
|
Resolution in Z |
Better than 0.5 |
Better than 0.5 |
nm |
|
|
Closed-loop linearity |
Better than 0.1 |
- |
%F.S. |
|
|
Closed-loop repeatability |
Better than 0.1 |
- |
%F.S. |
|
|
Unloaded resonant frequency |
1 |
1 |
kHz±5% |
|
|
Structure |
Hexapods |
Hexapods |
|
|
|
Driving source |
Piezo actuators |
Piezo actuators |
|
|
|
Load capacity |
5 |
5 |
kg |
|
|
Mass |
1300 |
1300 |
g±5% |
|
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
