- Introduction
- Feedback
H60 Piezo Hexapod is a piezo stage with 6-axis motion of θx, θy, θz, X, Y, and Z. 6-axis movement in space is realized by the coordinated expansion and contraction of six piezo actuators. The closed-loop model has high positioning accuracy. It is suited for applications such as microelectronics precision machining, test, etc.
Characteristics
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Models |
S - closed loop K - open loop |
H60.XYZTR1S |
H60.XYZTR1K |
Units |
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Active axis |
X, Y, Z, θx, θy, θz |
X, Y, Z, θx, θy, θz |
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Drive control |
6 driving channels 6 sensing channels |
6 driving channels |
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Linear travel in X、Y（0~120V） |
±6.5 |
±6.5 |
µm±20% |
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Linear travel in Z （0~120V） |
±3.2 |
±3.2 |
µm±20% |
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Tilt angle in θx,θy（0~120V） |
±0.16（±30"） |
±0.16（±30"） |
mrad±20% |
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Tilt angle in θz（0~120V） |
±0.24（±50"） |
±0.24（±50"） |
mrad±20% |
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Tilt resolution, θx,θy |
0.02（＜0.01"） |
0.01（＜0.01"） |
μrad |
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Tilt resolution, θz |
0.04（＜0.01"） |
0.02（＜0.01"） |
μrad |
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Resolution in X、Y |
0.8 |
0.4 |
nm |
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Resolution in Z |
0.4 |
0.2 |
nm |
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Stiffness |
50 |
50 |
N/μm±20% |
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Closed-loop linearity |
0.25 |
- |
%F.S. |
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Closed-loop repeatability |
0.1 |
- |
%F.S. |
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Unloaded resonant frequency |
1 |
1 |
kHz±5% |
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Structure |
Hexapods |
Hexapods |
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Driving source |
Piezo actuators |
Piezo actuators |
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Load capacity |
5 |
5 |
kg |
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Mass |
1000 |
1000 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
