H60.XYZTR1SK Hexapod, 13μm, 0.5mradCurrent Location:Product Homepage >> 6 Axes Nanopositioner>>H60.XYZTR1SK Hexapod, 13μm, 0.5mrad
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H60 Series Piezo Hexapods is a piezo stage with six-axis motion of θx, θy, θz, X, Y, and Z. The six-degree-of-freedom movement in space is realized by the coordinated expansion and contraction of six piezoelectric actuators. The closed-loop model has high positioning accuracy. It is suited for applications such as six-degree-of-freedom micro-operation and micro-electronic precision machining.


Characteristics


 θx, θy, θz, X, Y, Z motion

 Closed-loop control with high accuracy

 Ultra small coupling

 No accumulation of error

    Technical data

Models

S - closed loop

K - open  loop

H60.XYZTR1S

H60.XYZTR1K

Units

Active axis

X, Y, Z, θx, θy, θz

X, Y, Z, θx, θy, θz

 

Drive control

6 driving channels 6 sensing channels

6 driving channels

 

Linear travel in XY0~120V

±6.5

±6.5

µm±20%

Linear travel in Z 0~120V

±3.2

±3.2

µm±20%

Tilt angle in θx,θy0~120V

±0.16(±30"

±0.16(±30"

mrad±20%

Tilt angle in θz0~120V

±0.24(±50"

±0.24(±50"

mrad±20%

Tilt resolution, θx,θy

0.02(<0.01"

0.01(<0.01"

μrad

Tilt resolution, θz

0.04(<0.01"

0.02(<0.01"

μrad

Resolution in XY

0.8

0.4

nm

Resolution in Z

0.4

0.2

nm

Stiffness

50

50

N/μm±20%

Closed-loop linearity

0.25

-

%F.S.

Closed-loop repeatability

0.1

-

%F.S.

Unloaded resonant frequency

1

1

kHz±5%

Structure

 Hexapods

 Hexapods

 

Driving source

Piezo actuators

Piezo actuators

 

Load capacity

5

5

kg

Mass

1000

1000

g±5%

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    Downloads
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Step
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