- Introduction
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Characteristics
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Recommended Controllers  |
| Technical Data | ||||
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Type |
P65.XY200Z50S
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P65.XY200Z50K |
Units |
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Active axes |
X,Y,Z |
X,Y,Z |
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Drive control |
8 driving channels 8 sensing channels |
8 driving channels |
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Nominal travel range(0~120V) |
XY160/Z40 |
XY160/Z40 |
μm±10% |
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Max.travel range(0~150V) |
XY200/Z50 |
XY200/Z50 |
μm±10% |
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Sensor type |
SGS |
- |
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Resolution |
XY3/Z2 |
XY1/Z0.6 |
nm |
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Linearity |
XY0.015/Z0.007 |
- |
%F.S. |
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Repeatability |
XY0.017/Z0.006 |
- |
%F.S. |
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Pitch/Yaw/Roll |
＜10 |
＜10 |
μrad |
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Unloaded resonant frequency |
X260/Y220/Z280 |
X260/Y220/Z280 |
Hz±20% |
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Resonant frequency@500g |
150 |
150 |
Hz±20% |
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Step time |
100@500g |
10 |
ms±20% |
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Load capacity |
Horizontal |
1 |
1 |
kg |
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Vertical |
0.1 | 0.1 | ||
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Inverted |
0.2 | 0.2 | ||
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El. capacitance |
XY13.6/Z3.2 |
XY13.6/Z3.2 |
μF±20% |
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Material |
Steel,Al |
Steel,Al |
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Mass(Cable included) |
1.24 |
1.24 |
kg±5% |
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| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
