Piezo Micrometer (without loading platform)
·Micrometer with 13mm travel range
·Piezo displacement can be 25µm, 100µm or 250µm
·Resolution up to nanometer to subnanometer
·Optional sensor
Piezo Micrometer (with loading platform)
·Micrometer with 13mm travel range
·Piezo displacement can be 25µm, 100µm or 250µm
·Resolution up to nanometer to subnanometer
·Provides a mechanical mounting interface
·Optional sensor
Technical Data of Loading Platform
·Flatness: <3μm/13mm
·Guide rail: CROSS-ROLLER
·Resolution up to nanometer to subnanometer
·Platform size: 65mm x 65mm
Compact 3 Axes Piezo Micrometer
·Micrometer with 5mm coarse travel range
·Micrometer with 0.2mm fine travel range
·18μm piezo travel range
·Resolution up to nanometer to subnanometer