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High Precision Linear Piezoelectric Motor - CoreMorrow N31 Series

Update time：2022-07-06 13:03:12Clicks：1087second
In recent years, with the upgrading and progress of industrial equipment and applications, higher requirements for motion control, such as larger stroke (mm level) and higher motion accuracy (nm level), has been put forward. CoreMorrow technician team, focused on the application of cutting-edge technology and combined with their technical advantages, organized a large number of design and test, finally achieved a technological breakthrough, successfully developed a linear piezoelectric motor platform.



 CoreMorrow Linear Piezoelectric Motor



The piezoelectric motor is drived by piezo ceramics. With special mechanical structure design, the linear micro-displacement generated by piezo ceramics is converted into the macroscopic linear motion of the mechanical plane, the range is up to hundreds of millimeters, and the precision can still maintain the ultra-high nanometer level of piezo ceramics.


Introduction

The driving principle of CoreMorrow N31 series linear piezoelectric motor is shown in the figure below, which shows the dynamic driving effect of part of the piezoelectric driving foot.



The linear piezoelectric motor is driven by several pairs of piezoelectric ceramics, which push or pull under different voltages, so that the moving table crawls forward or backward. The coordination between each pair of piezoelectric ceramics increases the movement speed of the linear piezoelectric motor exponentially. Moreover, the linear piezoelectric motor with this structure provides a very high holding force, which is more than 10 times that of the general piezoelectric motor.

The N31 series linear piezoelectric motor is internally driven by high-performance PZT. The linear motion range can be 25, 50 or 100mm, and the resolution can reach sub-nanometer level. Closed-loop servo sensors (incremental encoder) for high positioning accuracy and motion platform are available.


N13.25E Linear Piezoelectric Motor

(25mm travel range, with closed-loop sensor and motion platform.)

N13.25E直线压电马达


N13.50E Linear Piezoelectric Motor

(50mm travel range, with closed-loop sensor and motion platform.)

N13.50E直线压电马达


N13.100E Linear Piezoelectric Motor

(100mm travel range, with closed-loop sensor and motion platform.)

N13.100E直线压电马达


Characteristics
• Large blocking force
•Automatic zero position after power-on
•Closed-loop automatic return after accidental touch
•Optional grating sensor
•Wear-resistant material, vacuum non-magnetic compatible
•Optional 2 or 3 axes


Applications
•Industrial precision positioning
•Semiconductor technology/testing
•Wafer testing
•Lithography
•Nano imprint
•Nanometrics
•Operating in strong magnetic fields and vacuum


Displacement Test of Linear Piezoelectric Motor

直线压电马达位移测试


Large Blocking Force
N31 series linear piezoelectric motors have an active push and pull force of 30N and a passive holding force of 40N, when placed horizontally, they can carry out high-precision movement under a load of 5kg.

Optional Mobile Platform

The N31 series linear piezoelectric motor can be fitted with mobile platform according to application requirements. The surface of the mobile platform is reserved with threaded holes for array mounting.

N31系列直线压电马达

Without platform



With platform mounted 


Wear-resistant Material
N31 series linear piezoelectric motors are made of high wear-resistant materials with a service life of more than 1,000 meters.


High Precision Incremental Encoder
N31 series linear piezoelectric motors can be equipped with an incremental encoder as a closed-loop sensor, which can improve linear motion accuracy, resolution < 10nm.


Self-locking After Power Off
N31 series linear piezoelectric motors can be self-locked after power off, and will automatically return to zero position after power-on again. During operation, when the stroke changes due to external forces, the N31 will automatically adjust to maintain the control position accuracy.


Technical Data
Model: N31
Active axes: X
Integrated sensor: Incremental encoder
Travel range: 25, 50 or 100mm
Speed limit: 10mm/s
Resolution(Closed-loop): ＜10nm
Resolution(Open-loop): ＜0.1nm
Linearity: 1μm
Repeatability: 1μm
Push/pull force (Possitive): 30N
Holding force (Passive): 40N
Max load (horizontal direction): 5kg
Operating temperature: 0~50℃
Mass (with cable): 565~ 715g
Material: Al,Steel
Cable length: 1.5m




Piezo Motor Controller



E71 series piezo controller is specially developed for driving N31 linear piezoelectric motors. It is controlled by the host computer, and the motion speed of the piezoelectric motor is adjustable.

E71系列压电控制器


Technical Data

Model: E71
Control: Servo control/Open loop
Power supply: 24VDC/4A(20V~30V)
Static power consumption: <10 W
D/A converter: 32bit 168MHzD/A
D/A converter: 16bit
Serial port baud rate: 115200
Communication Interface: USB, RS-422, RS-232
Peak current: 1A
Average current: 75mA
Ripple: 10mVpp(@2.2μF)
Rated output power: 50W
Operating temperature range: 0~50℃
Output short-circuit current: 60mA
Size: 162.5×162×45.5 mm^3
Weight: 1.3kg


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