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CoreMorrow Piezo Macro-Micro Combination Stage Suitable for Cage Structure!

Update time：2022-03-28 11:49:51Clicks：1131second
With the development of piezo technology, researchers are no longer satisfied with the scene requirements of small displacement and high precision, and the demand for larger displacement stroke with high precision is constantly proposed. Such piezo products have also emerged as the times require with the development and progress of piezo technology. CoreMorrow XYZ72SN81K13 series piezo macro-micro combination stage adopts the combination of piezoelectric stick-slip principle and piezoelectric micro-motion technology to meet the XY axis millimeter-level large stroke, and achieve Z-axis nanometer-level high precision.。

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Features



· XY millimeter stroke, suitable for lateral adjustment of the lens

· Z micro-travel, suitable for optical focus adjustment

· Φ35mm aperture, suitable for transmitted light applications

· Voltage drive control, fast response and convenient operation


Macro-Micro Combination



XYZ72SN81K13 adopts macro-micro composite method, which perfectly combines piezoelectric stick-slip principle and piezoelectric micro-motion technology. Realize large stroke macro movement of XY stroke to ±5mm/axis,  Z axis can be adjusted by micro movement, and the stroke can reach 8μm.

• XY Millimeter Travel Motion, Piezo Screw Driving

XY axis is driven by the piezo screw designed and produced by CoreMorrow. It uses the stick-slip principle and has the characteristics of large stroke and high precision. Combined with the hollow sliding platform, the linear motion of the piezo screw is converted into the XY axis motion of the sliding platform.

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• Z micrometer travel motion, piezo direct driving

Z-axis adopts piezo direct drive structure, providing micron-level travel and nano-level precision. The driving voltage has a linear relationship with the motion stroke.

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Equipped with Cage structure Mounting Holes



XYZ72SN81K13 is specially designed for the application in the cage structure. The structure is equipped with cage structure mounting through holes, which can be directly integrated into the cage structure. It can be used to carry any optical element, such as carrying a lens in a cage structure, the movement adjustment in the XYaxis can precisely control the center position of the lens focus in the plane, and Z axismicro-motion enables precise nanoscale fine-tuning of the position of the focal point on the optical axis.

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XYZ72SN81K13 adopts φ35mm aperture structure, which is suitable for optical applications.

 

Z Axis Displacement and Voltage Curves



Different from the driving principle in the XY direction, when the Z direction is driven, the displacement generated is linearly related to the driving voltage.

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Parameters


Model: XYZ72SN81K13
Active axis: XYZ
XY macro stroke: ±5mm/axis
Z piezo stroke: 8μm@150V
XY min. increment: <30nm
Closed/open loop resolution(Z): 0.3/0.1nm
Sensor(Z): SGS
Unload resonant frequency(Z): 2.5kHz
Load capacity: upright 500g/side 200g

 

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