Features
• XYZ motion
• Stroke can reach 25.4mm/axis
• Resolution up to 0.5μm
• The vacuum is 10^-5Pa
• Customizable closed-loop version
Applications
• Lithography
• Nanoimprint/Nanometrics
• Semiconductor technology/miconductor testing
• Movement in a strong magnetic and vacuum field
1~3 Axis Motion Platform
X65
N81K26
XY65
N81K26
Technical Parameter
Model: XYZ65N81K26
Motion axis: XYZ
Travel range: 25.4mm/axis
Minimum displacement increment: <30nm
Resolution: 0.5μm
Center load: 50N
Bearing: Ball
Material: Aluminum
Working temperature: 10~40℃
Port: 4-Pin
Outgoing line length: 2m
Products Video Show
https://www.youtube.com/watch?v=C5heZY20kIc
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