Features
· Three-dimensional XYZ movement
· Stroke 100μm/axis
· Center through hole Ø10mm
· Suitable for vacuum applications
Application Field
· Scanning microscopy / surface measurement
· Confocal microscopy / miconductor testing
· Wafer positioning / image processing and stabilization
· Optical fiber positioning / optical scanning
Voltage Displacement Curve
Technical Parameters
Model: P12B.XYZ100
Motion axis: XYZ
Stroke range (0~150V): 100μm/axis
Sensor type: SGS
Center through hole: Ø10mm
Outer diameter: Ø49mm
Electrostatic capacity: 3.6μF/axis
Carrying capacity: 0.2kg
Working temperature range: -20~80℃
Material: steel, aluminum
Dimensions (height): 38.5mm
Outgoing line length: 1.5m
Sensing/Voltage Connector: LEMO