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Nano Processing Technology
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Nanoimprint Technology
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Basic Process of Nanoimprinting
Figure 1 Basic flow chart of nanoimprint technology
Because nanoimprint technology uses a 1:1 ratio mask to transfer graphics, there is no need to consider the problem of limited resolution.
CoreMorrow Piezo Displacement Platform
Examples of Parameters of CoreMorrow's Piezo Nanopositioning Stage
P12A.XY200Z100 Piezo Scanning Stage
Model: P12A.XY200Z100S
Closed loop sensor: Yes
Motion axis: X Y Z
Travel range: XY250μm/axis, Z100μm
P15.XYZ100 Piezoelectric Nano Positioning Stage
Model: P15.XYZ100S
Closed loop sensor: Yes
Degree of freedom of movement: X Y Z
Travel range: 120μm/axis
P15.XYZ300 Piezoelectric Nano Positioning Stage
Model: P15.XYZ300S/K-C1
Closed loop sensor: Yes
Motion axis: X Y Z
Travel range: 300μm/axis
P17.XY200 Piezoelectric Nano Positioning Stage
Model: P17.XY200S
Closed loop sensor: Yes
Motion axis: X Y
Travel range: 187.5μm/axis
P18.XY200 Piezoelectric Nano Positioning Stage
Model: P18.XY200S
Closed loop sensor: Yes
Motion axis: X Y
Travel range: 250μm/axis