The Closed-Loop Version with High Positioning Accuracy
Features
• One-dimensional Z motion
• Stroke up to 250μm
• Load capacity up to 1kg
• Optional vacuum compatible version
Application
• Metrology/Interference/Scan
• Nano positioning
• CD drive test
• Semiconductor technology
• Quality Assurance Testing
• Micro machining/precision control
Technical Parameters
Model: P60.Z250
Motion axis: Z
Nominal travel range (0~120V): 200μm
Stroke range (0~150V): 250μm
Sensor type: SGS
Closed/open loop resolution: 10/3nm
Closed loop linearity: 0.4%F.S.
Repeat positioning accuracy: 0.1%F.S.
No-load resonance frequency: 260Hz
Carrying capacity: 1kg
Electrostatic capacity: 21.6μF
Working temperature range: -20~80℃
Material: steel, aluminum
Weight (not include cable): 0.4kg
Vacuum degree: 1×10^(-5)mbar
Dimensions (length×width×height): 80×60×20mm
Outgoing line length: 1.5m
Motion Effect Display: