Feature
• Displacement up to 105μm
• Load capacity 1.5kg
• High accuracy
• Open loop and closed loop optional
• Vacuum version available
Frequency load curve
High Stiffness Large Load Capacity
Applications
Technical data
Model: P16.XY100
Active axis: XY
Travel range(0~120V): 80μm/±40μm
Travel range(0~150V): 100μm/±50μm
Closed loop sensor: SGS
Aperture: Ø20mm
Closed/open loop resolution: 10/5nm
Closed loop linearity: 1%F.S.
Closed loop repeatability: 0.5%F.S.
Pitch/yaw/roll: <25μrad
Push/pull force: 30/30N
Stiffness: 0.5N/μm
Unload resonant frequency: 600Hz
Closed/open loop unload step time: 10/1.6ms
Load capacity: 1.5kg
Capacitance: 3.6μF/axis
Material: Steel, aluminum
Mass: 220g