P12A.XY200Z100 piezo stage fully meets the requirements of sample calibration applications. The large aperture of 45mm×45mm allows the objective lens to be placed directly under the sample. The integrated closed-loop feedback sensor ensures long-term high-precision sample adjustment, and the integrated structure makes multi-dimensional movement without coupling.
Features
3D piezo sample positioner
Aperture 45mm×45mm
High positioning accuracy
The range of motion can reach X250/Y250/Z100μm
Quick response
Technical data
Model:P12A.XY200Z100S
Active axis: XYZ
Travel range(0~120V): XY200/Z80μm
Travel range(0~150V): XY250/Z100μm
Closed loop sensor: SGS
Closed loop resolution: XY13/Z7nm
Closed loop linearity: XY0.1/Z0.2%F.S.
Closed loop repeatability: XY0.05/Z0.1%F.S.
Unload resonant frequency: XY240/Z150Hz
Load capacity: 500g
Capacitance: XY7.2/Z1.8μF
Material: Steel, aluminum