Features
X axis motion
±165μm travel range
Anti-vibration design
High and low temperature version
High accuracy for closed loop version
High reliability, high stability
Parameters
Models:XD603
Active axis:X
Travel range(0~120V):±130μm
Travel range(0~150V):±165μm
Closed loop sensor:SGS
Closed/open loop resolution:12/5nm
Closed loop Linearity:0.1%F.S.
Closed loop Repeatability:0.04%F.S.
Pitch/yaw/roll:1μrad
Push/pull force:300/30N
Stiffness in motion direction:1.2N/μm
Unloaded resonant frequency:490Hz
Unloaded closed loop step time:80/40ms
Load:0.6kg
Capacitance:24.6μF
Operating temperature:-40~+80℃
Anti-vibration:Half sine 15g,11ms
Rear peak sawtooth wave 20g,11ms
Material:Steel, Aluminum
Mass:950g
Recommended controller