N62 series XY piezo scanner is an XY-axis translation scanning platform, adopting amplifying mechanism. Center aperture diameter is 26mm, which can realize ±10μm displacement in X and Y axis. The product is compact and easy to integrate.
Travel to ±10μm
Load capacity to 1kg
Aperture:Ø6mm
High closed-loop repeatability
Open/closed loop
Custom is available
Microscopic imaging
Surface inspection
Image stabilization
Interference/metering
Precision positioning
XY scanning
Frequency and Load Curve
High Dynamics, Resolution and Accuracy
Exellent Dynamics
Model: N62.XY20
Active axis: XY
Travel range(0~120V): ±8μm/axis
ravel range(0~150V): ±10μm/axis
Sensor type: SGS
Aperture size: Ø26mm
Resolution: 1/0.5nm
Linearity: 0.3%F.S.
Repeatability: 0.1%F.S.
Pitch/yaw/roll: <10μrad
Push/pull force: 44/44N
Stiffness in motion direction: X2.2/Y2.2N/μm
Unloaded resonant frequency: X2000/Y2000Hz
Unloaded step time: 1.5/0.7ms
Load capacity: 1kg
El.capacitance: 1.6μF/axis
Material: Steel, Al
Mass: 180g