XP-63X is piezo actuator direct driving piezo nanopositioning stage. It adopts frictionless flexible hinge guiding mechanism and has the characteristics of high rigidity, high resolution and fast response time.
Features
• Max stroke to60μm
• Max load to 5kg
• Repeatability 0.05%F.S.
• Quick response time
Large Stiffness High Accuracy
Freqency VS Load Curve
Parameters
Model: XP-633
Axis:X
Travel range(0~120V): 48μm
Travel range(0~150V): 60μm
Closed loop sensor: SGS
Closed/open loop resolution: 2/0.3nm
Closed-loop linearity: 0.15%F.S.
Repeatability: 0.1%F.S.
Pitch/Yaw/Roll: <30μrad
Push/pull force capacity: 480/80N
Stiffness: 10N/μm
Unloaded resonant frequency: 1.5kHz
Closed/open-loop unloaded
Step time: 5/3.2ms
Load capacity: 5kg
Electrical capacitance: 7.2μF
Material: Aluminum
Mass: 450g