Application of precision and ultra-precision machining technology is no longer limited to a few sectors. It has expanded to many fields in daily life and applications, and the scale of applications has also increased greatly. Ultra-precision machining is the most effective way to achieve nano-machining. The piezoelectric fast tool servo system is the core device in ultra-precision machining. The rapid tool positioning stage drives the turning tool or other tools to feed at the nano- and nano-level to process on the workpiece surface. In addition, it can also process various rotating surfaces, such as inner cylindrical surface, inner and outer conical surface, thread, groove, end surface and forming surface.
CoreMorrow fast tool servo system is developed for ultra-precision machining. Using its own high response frequency, high rigidity, high precision and other characteristics, the tool is driven to quickly achieve a full stroke of 118μm in the direction of movement. Precision machining of complex surface-shaped workpieces or structures is especially suitable for applications such as tool micro-feed, error compensation, and FTS micro-displacement stage.
Technical data
Model: P93.X100
Travel range(0~120V): 95μm
Travel range(0~150V): 118μm
Sensor: CAP/LVDT
Closed/open loop: 15/20/10nm
Closed loop linearity: 0.1/0.15%F.S.
Closed loop repeatability: 0.03/0.05%F.S.
Pitch/Yaw/Roll: <20μrad
Push/pull force capacity: 300/25N
Stiffness: 3N/μm
Unloaded resonant frequency: 0.2kHz
Closed/open loop unloaded Step time: 30/7ms
Load capacity: 20kg
Capacitance: 15μF
Material: Steel
Mass: 3500g