As high-precision optical instrument, the Michelson interferometer has a very broad application. It can be used not only to measure the wavelength of light, but also to measure the refractive index of gas or liquid, the thickness of glass, the angle of inclination of the cleavage tip, and the measurement of distance etc.
The principle of Michelson interferometer is to split an incident beam into two beams through a beam splitter, and each is reflected back by the corresponding plane mirror, because the two beams have the same frequency, the same vibration direction, and a constant phase difference (that is, the interference condition is met ), so interference can occur. The different optical paths of the two beams in the interference can be achieved by adjusting the length of the interference arm and changing the refractive index of the medium, so that different interference patterns can be formed. By adjusting the interferometer, interference fringes of equal thickness can be generated, as well as interference fringes of equal inclination. This principle can be used to develop a variety of measuring instruments.
The following image is a built Michelson interferometer system, which uses CoreMorrow P63.Z piezoelectric nanopositioning stage as phase shifter, the phase shift stroke is 0~6.8μm, and the phase shift resolution can reach 0.1nm, full-stroke 6.8μm motion range is 0.3ms, and the speed of nano-step scanning will be faster.
P63.Z piezoelectric nanopositioning stage is usually used with the moving surface facing upwards, and the movement displacement along the longitudinal direction, as shown in the figure below. However, in this system, the horizontal placement method is adopted, and the movement displacement is generated along the horizontal direction.
When the Z-direction piezoelectric motion stage is used horizontally, its force will change. When you order, please be sure to inform us that we will make corresponding adjustments to the interior according to the use scenario to better adapt to the use environment and improve reliability.
P63.Z Motion Diagram
P63.Z Technical data
Model: P63.Z7S
Active axis: Z
Travel range@120V: 5.5μm
Travel range@150V: 6.8μm
Sensor: SGS
Closed/open loop resolution: 0.2/0.1nm
Closed loop linearity: 0.4%F.S.
Closed loop repeatability: 0.2%F.S.
Pitch/Yaw/Roll: <5μrad
Push/pull force capacity: 10/2N
Stiffness: 1.5N/μm
Unloaded resonant Frequency: 2kHz
Closed/open-loop
unloaded Step time: 1.5/0.3ms
Unloaded operating Frequency: 200Hz
Load capacity: 0.8kg
Electrical capacitance: 0.8μF
Material: Aluminum
Mass: 70g