P32 series piezo fast steering mirrors provide high-speed precision deflection movements in two axes θx and θy and linear motion in the Z axis. The resolution of linear motion can reach sub-nanometer level, the deflection resolution can reach sub-micro radian, and the response time can reach the order of milliseconds.
Features
• θx, θy and Z-axis
• Tilt angle to 6mrad
• Sub-ms response
• High closed loop positioning accuracy
Applications
• Image processing and stabilization • Optical filters
• Active and adaptive optics • Laser scanning / beam deflection
• Beam stabilization • Error correction for polygon mirrors
Operating principle
P32 series of fast steering mirror is based on three piezo actuators design, driven by three
piezo actuators, with an angle of 120 ° placed, the use of coordinate transformation, the
movement can be divided between different agencies control. This structural design can be
achieved in addition to the platform tilt, but also to achieve the platform Z direction of the
linear movement can be used to correct the optical path length. Among them, A, B, C, said the
measured 3 points at the displacement, two-axis swing angle and Z-displacement of the
simple formula are as follows,
Technical data
- Models: P32
- Active axes: θx, θy, Z
- θx, θy tilt angle: 5mrad@120V
- θx, θ tilt angle: 6mrad@150V
- Z travel range: 30μm@120V
- Z travel range: 37.5μm@150V
- Sensor:SGS
- Closed/open loop resolution in θx,θy:0.1/0.05μrad
- Closed/open loop resolution in Z: 1/0.5 nm
- Linearity: 0.05%F.S.
- Repeatability: 0.02%F.S.
- Unload resonant frequency: 2kHz
- Closed/open-loop unloaded Step time: 5/2ms
- Electrical capacitance: 3.6μF/axis
- Material: Steel
- Mass: 350g
Recommended Piezo Controller
E70 is a 3-channel piezo ceramic controller with small size, high power, low power consumption, high bandwidth and low ripple noise. The controller uses a dedicated op amp circuit to ensure high-voltage and high-current output capabilities. The sensor servo module is optimized to improve the accuracy and stability of PI adjustment and control. The reliable anti-interference design ensures the high-frequency response speed of the controller. .
E70.D3S piezoelectric controller adopts DC24V power supply, integrated digital and analog control functions, optional open / closed loop, RS-232 / RS-422 / USB communication optional, integrated PZT & sensor mini interface for easy connection, and external settable control Function, simple and convenient operation.
Technical data
- Models: E70.D3S-I2
- Function: Digital and analog piezo controller
- Channel: 3
- Analog input: 0-10V
- Output voltage:0-120V(optional 0-150V)
- Peak current:1.1A/channel
- Ave. current:70mA/channel
- Bandwidth:10kHz/channel
- Output voltage ripple:5mV(2.2μF)
- PZT connector:ECG.1B.314(LEMO)
- Input connector:SMB
- Sensor:SGS
- Sensor output connector:EPG.0B.304(LEMO)
- Sensor output ripple(:10mV
- Communicate interface:RS-232/422、USB
- Software could be Secondary Development
- Operating temperature: 0-50℃
- Size: 168.5×134×45.5mm
- Mass 1.2kg
- Power supply: 24V DC1.5A(36W)
- With over current protection