P17 is 2-dimensional scanning stage specially developed for applications requiring large aperture and large displacement. The scanner adopts amplified mechanism and built-in high-reliability piezo actuators, which could realize the scanning range of 187.5μm, and the aperture is 60×60mm. It has been widely used in the fields of precise positioning, scanning microscopy and interference of samples.

Features:

· XY axis

· Max stroke to 187.5μm

· Max load to 1kg

· Aperture：60×60mm

· Quick response time

Applications

· Image processing and stabilization

· Interference

· Scanning microscopy

· Surface inspection

· Wafer positioning

· Micromanipulation

Step Time

Step time of P17.XY200S load 10g up to full stroke is about 30ms.

Large Aperture, Large Displacement

P17 is fast and high-precision scanning stage to could realize stroke of 187.5μm/axis. Excellent structural design without friction, high guiding precision, quick response time to 5ms.

Closed-loop version uses high-precision sensing feedback. 60×60mm aperture of the scanner is suitable for wafer positioning or micro-operation in industrial automation.

Application Cases

P17 is suitable for applications high precision. It has been successfully used in semiconductor testing, surface structure analysis, microscopic imaging.

Used in conjunction with CoreMorrow piezo objective scanner for wafer positioning, the wafer could be driven to perform nano-scale precision positioning of 187.5μm displacement.

Technical Data

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.