Piezo Stack driven micro-positioning tip/tilt stage is widely used in the field of micro-nano technology, and is usually a key component in the applied system. CoreMorrow ’s piezo tilt stage uses piezo stacks as the driving source. The internal design uses non-return-flexible flexible hinge parallel structure design for precise angle adjustment. It has the advantages of small size, compact structure, no mechanical friction, and high positioning accuracy, which ensure the product It has good deflection accuracy and stability and fast response speed, and has wide application prospects in laser beam scanning and laser beam combining.
P54 Series Piezo Tip/Tilt Stages
P54 series is a two-dimensional θx and θy-axis piezoelectric deflection stage with a large central through-hole. It adopts a frictionless flexible hinge structure design with fast response speed
and high closed-loop positioning accuracy. The 80×80mm center large transparent hole makes it easy to be integrated into the systems of microscopy and scanning optics.
Features:
· θx, θy
· Open / closed loop
· 80 × 80mm large through hole
· High-resolution
· Thin profile
Closed-loop with High Accuracy
The internal flexible hinge guiding mechanism is optimized by finite element analysis to minimize the angular offset and no friction. P54 tip/tilt stage can achieve a maximum deflection range
of ±1mrad with a resolution of up to 0.05μrad. The closed-loop sensor can be optionally configured to achieve a repeatability of 0.1% F.S.
Load A Large Mirror
P54 piezoelectric stage has a large aperture of 80×80mm, which is very suitable for applications requiring transmitted light.
Load and Frequency Curve
Step Time
P54.T2S step time to reach full stroke with no load is about 20ms.
Technical Data
Models |
Suffix S - closed loop Suffix K - open loop |
P54.T2S P54.T2K |
Unit |
Active axis |
θx, θy |
|
|
Tilt angle(0~+120V) |
±0.8/axis(≈±170") |
mrad±20% |
|
Tilt angle(0~+150V) |
±1/axis(≈±200") |
mrad±20% |
|
Sensor type |
SGS/- |
|
|
Tilt resolution |
0.25(≈0.05") /0.05(≈0.01") |
μrad |
|
Closed-loop linearity |
0.2/- |
%F.S. |
|
Closed-loop repeatability |
0.1/- |
%F.S. |
|
Push/pull force |
40/8 |
N |
|
Stiffness in motion direction |
0.5 |
N/μm±20% |
|
Unloaded resonant frequency |
300 |
Hz±20% |
|
Unloaded step time |
20/3.5 |
ms±20% |
|
Closed-loop unloaded operating frequency |
10% travel |
50 |
Hz±20% |
100% travel |
15 |
||
Load capacity |
1 |
kg |
|
El.capacitance |
3.6/axis |
μF±20% |
|
Material |
Aluminum, steel |
|
|
Mass |
510 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.