In the forefront of modern science and technology, research into the microscopic world is becoming increasingly profound. The piezo nanoprobe platform, as a key precision instrument, is playing a crucial role. The piezo nanoprobe platform is a high-precision nano-manipulation device based on the piezoelectric effect, capable of achieving nanoscale displacement control and measurement. Its core principle is to utilize the inverse piezoelectric effect of piezoelectric ceramics, generating minute mechanical displacements through applied voltage, thereby enabling precise manipulation of samples. With its high resolution, rapid response, multi-degree-of-freedom movement, and vacuum compatibility, it has achieved breakthrough applications in several important fields, becoming an indispensable tool in nanotechnology research and applications, providing strong support for exploring the mysteries of the nanoscale world.
CoreMorrow Piezo Nanoprobe Platform
CoreMorrow piezo nanoprobe platform mainly consists of piezo ceramic-driven piezoelectric nano-positioning stages, piezoelectric motors, and probes. The active axis, travel range, precision, and number of probe modules can be customized as needed.
The image below shows a piezo nanoprobe demonstration system designed by CoreMorrow for the nanoprobe platform. This system features four probes, each capable of traveling 30mm in the XYZ axis, with each axis providing nanoscale precision. Below the central wafer is CoreMorrow piezo tip/tilt stage, which allows for nanoradian-level adjustments in the θx and θy directions to adjust the wafer's orientation. Above the wafer is CoreMorrow piezo objective lens positioner, enabling focus adjustments with a range of over 200μm. The coordination of these components allows for multi-degree-of-freedom synergy in the piezo nanoprobe platform, enabling dynamic real-time focus and orientation adjustments of the wafer.
The image below shows a CoreMorrow piezo nanoprobe platform, consisting of a central piezo nanoprobe platform paired with four piezo nanoprobe modules. Each probe has 7 active axes, with an operating temperature range from -45℃ to 100℃, and can be used in a vacuum environment up to 10^-4Pa.
Applications of Piezo Nanoprobe Platform
1. Semiconductor
The piezo nanoprobe station is a core device for high-precision detection and processing. As chip manufacturing processes continue to advance towards smaller dimensions, the requirements for measurement and manipulation precision of microstructures are extremely high. The piezo nanoprobe platform can precisely control the position of the probe, enabling electrical performance testing, micro-nano processing, and inspection of semiconductor devices at nanoscale.
Note: Image from online resources
2. Materials Science Research
Materials science research focuses on exploring the microstructure, properties, preparation, and applications of materials. In the exploration of microstructures, the piezo nanoprobe platform provides researchers with powerful analytical tools. By combining microscopy with the piezo nanoprobe platform, researchers can precisely observe and measure the surface morphology, structure, properties, and mechanical performance of materials at nanoscale.
Note: Image from online resources
3. Biomedical
In the biomedical field, the piezo nanoprobe platform provides a high-precision platform for biomolecular detection and cell research. Utilizing the high sensitivity of the probes, biomolecular detection can be performed on DNA, proteins, and other biomolecules. In cell research, the probes can measure the mechanical and electrical properties of cells.
Note: Image from online resources
4. Quantum Device Research
The piezo nanoprobe platform can provide high-precision displacement control, enabling operation and measurement at the micro-nano scale, and is suitable for use in low-temperature environments. It meets the needs of research on quantum dots, qubits, and superconducting quantum devices, showing broad application prospects in quantum device research.
Note: Image from online resources
CoreMorrow piezo nanoprobe platform, with its high-precision positioning and manipulation capabilities at nanoscale, demonstrates even broader application prospects. At the same time, we will continue to deepen our technological expertise, gradually enhancing the performance of the piezo nanoprobe platform, and bringing more breakthroughs and innovations to the exploration of the microscopic world.
For more details, please contact us by calling 0451-86268790 or 17051647888 (WeChat ID).