CoreMorrow piezo objective scanner can be divided into three types according to product performance: high dynamic, large stroke and large load. The high-dynamic piezo objective scanner is suitable for dynamic operation applications with a resonant frequency of up to several kHz, the large-stroke model uses an internal amplifier design with a travel range of up to 1mm, and the large-load model is more suitable for industrial applications with a maximum load of up to 0.9kg. CoreMorrow also provide custom service according to customer needs, in order to satisfy customers’ application in different scenarios.

P76F is a large-load piezo objective scanner with flexible hinge mechanism. It has no friction, good linearity and high closed-loop positioning accuracy. A square holder is mounted on the top, which can be fixed through two different aperture holes, making the installation more convenient. P76F Z-motion piezo objective scanner has a travel range of up to 90μm and a load of up to 900g, making it suitable for high-load applications such as wafer laser stealth dicing and semiconductor inspection equipment. The adapter linked to the objective lens can match a variety of thread profile, and can also be customized according to the customer's application and working environment . The product is shown as the following picture.

Displacement to 90 μm

Max load to 900g

Millisecond response time

Lens holder adapt to multiple thread profile

3D imaging

Interference/metrology

Autofocus system

Confocal microscopy

Wafer dicing

Semiconductor test

E53 piezo controller is suitable for driving the P76F piezo objective scanner. E53 is a single-channel controller designed for small volume application requirements, using 24VDC/1A power supply, analog and digital control, optional open and closed loop. It has a compact size of  148×27.5×80mm^3, and weight of 240g~350g, which is easy for integration. It has a cooling area in the body, which can quickly export the generated heat. The upper computer software supports secondary development. There are four versions for different functions, please check the following figure for reference.

For more details please contact CoreMorrow by calling 0451-86268790, 17051647888 (Wechat ID)！