

P60.X200 1-Axis High-Precision Nanopositioning Stage

Characteristics
X motion, travel range up to 200μm
Load capacity up to 1.3kg
2nm resolution
Open/closed loop version and UHV version available
Optional 2 or 3 axes motion
Applications
Optical measurement
Optical detection
Microscanning
Laser interferometry
Biotechnology
Technical Data
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Model |
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Active axes |
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Drive control |
1 driving channel, 1 sensing channel/1 driving channels |
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Travel range(0~120V) |
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Travel range(0~150V) |
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Sensor |
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Closed/open loop resolution |
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Closed-loop linearity |
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Closed-loop repeatability |
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Pitch/yaw/roll |
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Closed/open-loop unloaded step time |
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Unloaded resonant frequency |
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Unloaded resonant frequency |
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El. capacitance |
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Working temperature |
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Load capacity |
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Material |
Steel, Aluminum |
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Mass |
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Recomended Controller


