P60.X200 1-Axis High-Precision Nanopositioning Stage
Characteristics
X motion, travel range up to 200μm
Load capacity up to 1.3kg
2nm resolution
Open/closed loop version and UHV version available
Optional 2 or 3 axes motion
Applications
Optical measurement
Optical detection
Microscanning
Laser interferometry
Biotechnology
Technical Data
Model |
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Active axes |
|
Drive control |
1 driving channel, 1 sensing channel/1 driving channels |
Travel range(0~120V) |
|
Travel range(0~150V) |
|
Sensor |
|
Closed/open loop resolution |
|
Closed-loop linearity |
|
Closed-loop repeatability |
|
Pitch/yaw/roll |
|
Closed/open-loop unloaded step time |
|
Unloaded resonant frequency |
|
Unloaded resonant frequency |
|
El. capacitance |
|
Working temperature |
|
Load capacity |
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Material |
Steel, Aluminum |
Mass |
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Recomended Controller