The piezo nanoprobe stage is mainly composed of piezo motors and probes driven by piezoelectric ceramics. It can be widely applied in frontier fields such as new materials, new energy, semiconductors, biomedicine, basic scientific research, etc. Its main role is to complete nanoscale physical measurement and nanoscale motion, which can achieve accurate positioning in three axes. With the development of analytical instrument technology and the expanding application scenarios, piezoelectric nanoprobe stage has become an important part of analytical instruments.

CoreMorrow piezo nanoprobe stage has diversified motion form, and the motion dimension, direction, range, precision, number of probe modules and type of probe fixtures can be arbitrarily selected according to your requirements. Now we introduce a nanoprobe system with a central probe platform and four probe modules. 

CoreMorrow piezo nanoprobe stage has a central probe and equipped with 4 nanoprobe modules, as the following figure shows.

The central probe stage can carry out XYZ three-axis motion, XY motion travel ≥ 20mm, Z motion travel ≥ 20μm. It can be used in low temperature vacuum environment, with the temperature range from 0℃ to 60℃ and vacuum 10^-4Pa. The four probe modules can perform XYZ linear motion and R rotation, XY stroke ≥ 5mm, Z stroke ≥ 0.5mm, R rotation of the probe up to 180°.

Each probe has 7 motion dimensions

Millimeter motion is combined with micron motion

Mm stroke ≥20mm

High precision up to ≤2nm

The operating temperature range is 0℃ to 60℃

Vacuum conditions up to 10^-4Pa, can be customized

Motion axis, stroke, speed, dimensions, fixed interface, etc., can be customized  

Semiconductor Industry、Electrical performance testing and analysis、Materials、New energy、Physics、Biomedicine, etc. 

Note: The picture comes from the Internet

E53.D1E piezo controller is suitable for driving CoreMorrow piezo nanoprobe stages. It is a single-channel piezo controller, using digital control, closed-loop servo or open loop control, It has a small size of only 105×103×30.1mm^3, very suitable for the compact piezo nanoprobe stages. 

For more detailed information, please contact CoreMorrow by calling 0451-86268790, 17051647888 (Wechat ID).