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Piezo Nanomotion Products Applied to Semiconductor

Update time：2024-05-11 10:22:11Clicks：771second

With the rapid development of the semiconductor in recent years, semiconductor chip manufacturing has higher and higher requirements for precision and accuracy, which usually involves nanoscale precision operations requiring tight control and precise positioning to achieve, so precision positioning system plays a key role in this process. Piezoelectric ceramic products with its small size, high precision, fast response speed characteristics, has significant advantages in the trend of miniaturization, lightweight development of precision positioning system.

Application in Semiconductor

Laser Invisible Wafer Cutting

Laser invisible wafer cutting can divide the wafer into several single chips, which is non-contact processing with high precision and high efficiency. Laser wafer cutting is to focus the lasers through the lens , and then precisely adjust them to the focus position through the piezoelectric objective scanner, so that the focus is accurately positioned in the wafer to be cut, then the temperature of the cutting part rapidly rise, and then melt or vaporize. With the relative motion of the laser and the material to be cut, a slit is formed on the cutting material to achieve the cutting purpose.

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Application in Semiconductor

Detection of Wafer

Wafer as the basic component of semiconductor chip manufacturing, its performance is very important, so the detection of wafer is essential. Wafer’s position adjustment plays an important role in wafer inspection, and directly affects the manufacturing quality and performance of the chip. The key of wafer position adjustment is to adjust the wafer to the correct attitude through the precise positioning of each dimension to detect the operation, and it is also widely used in wafer processing, lithography and other processes.

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Application in Semiconductor

Lithography

In the entire chip manufacturing process, the most difficult is lithography. Lithography is the process of transferring patterns from a layout or mask to the surface of a semiconductor wafer by means of light waves. CoreMorrow provides piezoelectric ceramics for active vibration isolation during lithography, piezoelectric actuators for mask alignment and positioning fine-tuning, capacitive sensors for position or vibration monitoring, piezo tip/tilt stages for wafer or objective position adjustment, etc.

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Application in Semiconductor

Microscopy Imaging

The image sharpness can be significantly improved by using the CoreMorrow piezo objective scanner for nano-focusing, and the image effect can be changed from fuzzy to very clear. Nanometer scanning in which direction of XYZ can also be carried out by CoreMorrow scanner, which can increase the view range of the imaging observation process and make the imaging area larger.