What is Femtosecond Laser?
Characteristics of Femtosecond Laser
Basics and Typical Application of Laser Etching
1
Basics
2
Technical Features
3
Typical Applications
CoreMorrow P12A Piezo Scanner Used for Femtosecond Laser Etching
Technical Data
Model |
P12A.XYZ100 |
Active axes
|
XYZ |
Drive/Control |
3 channels drive |
Travel range(0~120V) |
80μm/axis |
Integrated sensor |
SGS |
Aperture |
45×45mm^2 |
Closed/open-loop resolution |
3nm/1nm |
Closed-loop Linearity |
0.15%F.S. |
Closed-loop Repeatability |
0.1%F.S. |
Pitch/yaw/roll |
<20μrad |
Push/pull force |
20N/4N |
Stiffness |
X0.3N/μm、Y0.25N/μm、Z0.2 N/μm |
Unloaded resonant frequency |
X200Hz/Y150Hz/Z120Hz |
Closed/open-loop unloaded step time |
30ms/0.8ms |
Load capacity |
0.5kg |
El. capacitance |
3.6μF/axis |
Material |
Steel, Aluminum
|
Mass |
350g |
Model |
P12A.XYZ200 |
Active axes |
XYZ |
Drive/Control |
3 channels drive |
Travel range(0~120V) |
160/axis |
Travel range(0~150V) |
200/axis |
Integrated sensor |
SGS |
Closed/open-loop resolution |
5.5nm/2nm |
Closed-loop Linearity |
0.5%F.S. |
Closed-loop Repeatability |
0.4%F.S. |
Unloaded resonant frequency |
X150Hz/Y130Hz/Z90Hz |
Load capacity |
0.3kg |
El. capacitance |
7.2μF/ axis |
Material |
Steel, Aluminum
|
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