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CoreMorrow Compact Ultra-Precision Capacitive Sensor, Capacitance Micrometer

Update time：2023-09-19 09:03:30Clicks：1316second
The high-precision micrometer is an instrument with a measuring range of micron or millimeter and a measuring accuracy of nanometer level, which can be divided into inductance, capacitance and laser. It is mainly used in high precision length (depth, height, thickness, diameter, taper) measurement, vibration measurement, micro displacement detection, etc., in aerospace, aviation, automotive, machine tools, optical device processing, semiconductor and other industrial measurement and control fields.
CoreMorrow small volume ultra-precision capacitive sensor consists of two parts, namely a capacitor probe and a control box. The capacitance probe is non-contact with size of Φ10mm×18.5mm, and the capacitance probe can measure the tiny displacement in the range of 0~500μm with resolution up to 1.25nm. The control box size is only 105×26×66mm^3, single channel output, the volume is very small, easy to be integrated, as the figure shown below.

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Characteristics

· Measuring range  0~500 μm
· Resolution up to 1.25nm
· Non-contact measurement
· Small size, easy integration

Typical Application

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Advantages of Capacitive Sensors

1. Good stability. The capacitance value of a capacitive sensor is usually independent of the electrode material, which is good for selecting a material with a cryogenic system, and since it generates little heat, it has little effect on stability.
2. Simple structure. Capacitive sensors are simple in structure, easy to ensure high precision, and can be made small. It can be used in special environments, such as high and low temperatures, strong magnetic and other harsh environments.
3. Good dynamic response. The electrostatic attraction between the plates is very small, its moving part can be made very small and thin, so the natural frequency is very high, the dynamic response time is short, and it can work at a frequency of several megahertz, which is especially suitable for dynamic measurement.
4. Non-contact measurement. When we use non-contact measurement, the influence of working surface roughness on measurement can be reduced.


System composition

The capacitor micrometer is composed of two parts, which are capacitance probe/capacitance sensor and sensing signal processing control module.

（1）Capacitance probe/capacitance sensor


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The capacitor probe (capacitance sensor) is cylindrical, which adopted the principle of parallel plate, when the distance between the measured object and the capacitor probe changes, it can convert this distance change into the corresponding tolerance change.

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Schematic diagram

Technical Data
Model
C01D10
C02D10
C05D10
 Unit
Measuring range
0~100
0~200
0~500
μm
Static resolution
1.25
2.5
5
nm
Dynamic resolution（1kHz）
50
100
200
nm
Linearity
50
100
200
nm
Repeatability
2.5
5
10
nm

Sensor diameter

10
mm
Minimum target diameter
10
mm
Sensor cable Length
1.5
m
Fix method
Radial clamping
Probe Size
Φ10×18.5
mm
Mass( incl. cable and connector)
55
g
Note: 1mm measuring range is available for your option.


（2）Sensing signal processing control module


The sensor signal processing control module is specially designed for matching CoreMorrow capacitor sensor, and its main function is to convert the displacement signal of the capacitor sensor into an electrical signal. It is small and compact, which is ideal for a variety of applications such as laboratory and industrial applications.

图片

Technical Data
Controller Model
E75.CapA1-H
Unit
Channel
1
Static resolution
0.00125
%F.S.
Dynamic resolution
0.05 (2kHz)
%F.S.
Analog signal output speed
2
kHz
Absolute error
±0.2
%F.S.
Linearity
0.05
%F.S.
Repeatability
0.0025
%F.S.
Signal temperature stability
＜0.005
%FSO/℃
Long-term stability
＜0.04
%FSO/month
Bandwidth
2
KHz（-3dB）
Operating temperature
+10~+50
℃
Storage temperature
-10~+75
℃
Environment humidity
<85
%
Power supply
24VDC/±50mA
V
Voltage output range（analog）
0~10
V
Sensor output interface
SMA
Size（L×W×D）
105×26×66
mm
Mass
0.18
kg
In addition, CoreMorrow has a modular capacitive sensor signal processing control module -  E09.CAP , which is available from 1 to 12 channels, and can also be customized according to different needs for more measurement channels.

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For more details about CoreMorrow E09.CAP capacitor sensor signal processing module, please contact us by calling 0451-86268790, 17051647888 (wechat ID)!


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